Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target

NI Qi-liang; QI Li-hong; CHEN Bo

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Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target

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- Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target
- Optics and Precision Engineering Vol. 12, Issue 6, Pages: 576-580(2004)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： O536
- Received：22 April 2004，
  
  Revised：18 November 2004，
  
  Published Online：15 December 2004，
  
  Published：15 December 2004
- 稿件说明：
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尼启良, 齐立红, 陈波. 使用气体靶激光等离子体光源的软X射线反射率计[J]. 光学精密工程, 2004,(6): 576-580

NI Qi-liang, QI Li-hong, CHEN Bo. Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 576-580
尼启良, 齐立红, 陈波. 使用气体靶激光等离子体光源的软X射线反射率计[J]. 光学精密工程, 2004,(6): 576-580 DOI：

NI Qi-liang, QI Li-hong, CHEN Bo. Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 576-580 DOI：

摘要

建立了一台使用气体靶激光等离子体光源的软X射线反射率计

并给出了使用该反射率计测量软X射线多层膜反射率的方法.与金属靶等离子体光源相比

由于使用了气体靶等离子体光源

该反射率计具有低碎屑、可长期连续运行等优点.针对单色仪的二级光谱对反射率测量结果产生的影响

提出了修正方法.并用此方法对实测的工作波长为17.1nm软X射线多层膜的反射率曲线进行了修正.

Abstract

A soft X-ray reflectometer using a laser produced-plasma(LPP)light source with gas-jet target is built

and the method to measure the reflectance of soft X-ray multilayer coatings employing the reflectometer is presented. In comparison with metal target LPP source

due to usage of gas-jet target LPP source

the reflectometer is debris-free and can continuously operate for a long time. At the same time

a new method to delete the effect of 2nd spectrum from monochromator on measurement results of soft X-ray multilayer coatings reflectance is put forward. A curve of reflectance Vs. wavelength of soft X-ray multilayer coating with center wavelength 17.1 nm is modified to utilize the method.

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Keywords

references

薛松,邵景鸿,徐正良.同步辐射软X射线多层膜分光反射率测试装置[J] .光学精密工程,1993,1(3):24-28.XUE S,SHAO J H,XU ZH L,et al.Reflectity-measuring equipmont for soft X-ray synchrotron radiation using a multilyer dispersing[J] .Opties and Prewsion Engineering,1993,1(3):24-28.(in Chinese)

薛松,邵景鸿.同步辐射软X射线多层膜反射率计的设计[J] .光学精密工程,1994,2(3):85-88.XUE S,SHAO J H.Design of soft X-ray synchrontron radvation multilayer reflectometer[J] .Optics and Precdsion Engineering,1994,2(3):85-88.(in Chinese)

LUDWING V L, THOMAS B, HERMANN M, et al. A new laboratory EUV reflectometer for large optics using a laser plasma source[J] . SPIE, 2003, 5038:12-21.

FUCHS D, KRUMREY M, MULLER P,et al. High precision soft X-ray reflectometer[J] . Rev. Sci. Instrum., 1995, 66(2):2248-2250.

KRUMREY M, MULLER M P, SCHOLZE F,et al. Precision soft X-ray reflectometry of curved multilayer optics[J] . SPIE, 1991, 1547:136-143.

TARRIO C, WATTS R N, LUCATORTO T B. Improved reflectometry facility at the national institute of standards and technology[J] . SPIE, 1994, 2011:534-539.

JOHANNES TUMMLER, HEIKE BLUME, GUIDE BRANDT, et al. Characterization of the PTB EUV reflectometry facility for large EUVL optical components[J] . SPIE, 2003, 5037:265-273.

AKIRA MIYAKE, TAKESHI MIYACHI, MITSUAKI AMEMIYA, et al. LPP-based reflectometer for characterization of EUV lithography systems[J] .SPIE, 2003, 5037:647-655.

TRAIL J A,BYER R L. Measurement of soft X-ray multilayer mirror reflectance at normal incidence using laser-produced plasma[J] . Appl. Phys. Lett., 1988, 52(4):269-271.

JOHANSSON G A, BERGLUND M. Compact soft X-ray reflectometer based on a line-emitting laser-plasma source[J] . Review of scientific instruments, 2001, 72(1):58-62.

WINDT D L, WASKIEWICZ W K, Soft X-ray reflectometry of multilayer coatings using a laser-plasma source[J] . SPIE, 1991, 1547:144-158.

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State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. Changchun 130033, China

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