Single-point diamond mirror turning of infrared aspheric lens

XIE Jin; Geng An-bing; XIONG Chang-xin; WU Xin-jian

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Single-point diamond mirror turning of infrared aspheric lens

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- Single-point diamond mirror turning of infrared aspheric lens
- Optics and Precision Engineering Vol. 12, Issue 6, Pages: 566-569(2004)
- 作者机构：
  
  1. 华南理工大学, 机械工程学院,广东广州,510640
  2. 华中光电技术研究所,湖北武汉,430074
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG506
- Received：22 April 2004，
  
  Revised：29 October 2004，
  
  Published Online：15 December 2004，
  
  Published：15 December 2004
- 稿件说明：
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谢晋, 耿安兵, 熊长新, 吴新建. 红外线聚光非球面透镜的单点金刚石镜面切削方法[J]. 光学精密工程, 2004,(6): 566-569

XIE Jin, Geng An-bing, XIONG Chang-xin, WU Xin-jian. Single-point diamond mirror turning of infrared aspheric lens[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 566-569
谢晋, 耿安兵, 熊长新, 吴新建. 红外线聚光非球面透镜的单点金刚石镜面切削方法[J]. 光学精密工程, 2004,(6): 566-569 DOI：

XIE Jin, Geng An-bing, XIONG Chang-xin, WU Xin-jian. Single-point diamond mirror turning of infrared aspheric lens[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 566-569 DOI：

摘要

根据硬脆性材料的延性域加工机理和面形误差补偿加工方法

研究了圆弧形和平头形刀具的单点金刚石延性域切削方法

在加工中直接获得了镜面切除面;并利用数控技术进行误差补偿

克服了因加工试验、刀具磨损、机械振动、热变形等造成的加工误差导致的非球面的面形精度降低和表面粗糙度恶化.并将该方法用于采用圆弧形刀具对红外线聚光的φ70mm非球面锗透镜进行单点金刚石切削实验中.试验结果表明面形误差补偿加工方法可以进一步消除加工误差

将非球面的面形精度

值从微米级(1.23μm)提高到亚微米级(0.36μm)的程度

表面粗糙度

从亚微米级(0.27μm)改善到超亚微米级(0.04μm)的范围.

Abstract

According to the ductile-mode machining principle of hard-brittle material and error compensation turning method

the ductile-mode turning method of aspheric surface of infrared lens is mainly discussed

which is concerning arc diamond tool and straight diamond tool

in order to directly obtain mirror cutting surface. The error compensation turning method is introduced to eliminate the influence of tool wear

machine librations and thermal distortion

etc. on the surface roughness and form accuracy. An experiment for a single-point diamond turning of germanium lens of φ70 mm was carried out by the use of error compensation turning method. The result shows that it may improve aspheric form accuracy

from 1.23 mm to 0.36 mm

and surface roughness

from 0.27 mm to 0.04 mm.

关键词

Keywords

references

罗松保,张建明.非球面曲面光学零件超精密加工装备与技术[J] .光学精密工程,2003,11(1): 75-77.LIO S B, ZHANG J M.Ultraprecision machining equipment and technology of aspheric optics[J] . Optics and Precision Engineering, 2003,11(1): 75-77.(in Chinese)

尹自强,李圣怡.超精密车削下刀具相对振动的辨别[J] .光学精密工程,2002,10(5): 497-503.YIN Z Q, LI SH Y.Identification of relative vibration in ultra-precision turning[J] . Optics and Precision Engineering, 2002,10(5): 497-503.(in Chinese)

TOYAMA T.Development of ultra-precision grinder for machining aspheric surface[J] . Toyota Machinery Report, 1992,32(3): 8-18.

YOSHIZUMI K. Ultrahigh accurate 3-D Profilometer using atomic force probe[J] . Journal of the Society of Grinding Engineers, 2001, 45(12):562-565.

SUZUIK H,KITAJIMA T,OKUYAMA S. Study of precision cutting of axi-symmetric aspherical surface-effect of tool errors on workpiece form accuracies and its compensation methods[J] . Journal of the Japan society for Precision Engineering, 1999,65(3): 401-405.

YAN J,SYOJI K,KURIYAGAWA T.Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-truing method[J] . Journal of the Japan Society for Precision Engineering, 2002,68(4):561-565.

YOSHIZUMI K. Ultrahigh accurate 3-D profilometer using atomic force probe[J] . Journal of the Society of Grinding Engineers, 2001,45(12): 562-565.

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