MEMS directly modulating wideband IR thermal source

JI Xin-ming; WU Fei-die; WANG Jian-ye; ZHOU Jia; XIE Hai-fen; HUANG Yi-ping

doi:null

您当前的位置：

首页 >

文章列表页 >

MEMS directly modulating wideband IR thermal source

更新时间：2020-08-12

- MEMS directly modulating wideband IR thermal source
- Optics and Precision Engineering Vol. 13, Issue 2, Pages: 144-150(2005)
- 作者机构：
  
  复旦大学微电子学系, 上海 200433
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN212
- Received：14 February 2005，
  
  Revised：30 March 2005，
  
  Published Online：30 April 2005，
  
  Published：30 April 2005
- 稿件说明：
移动端阅览
JI Xin-ming, WU Fei-die, WANG Jian-ye, et al. MEMS directly modulating wideband IR thermal source[J]. Optics and precision engineering, 2005, 13(2): 144-150.
DOI：

JI Xin-ming, WU Fei-die, WANG Jian-ye, et al. MEMS directly modulating wideband IR thermal source[J]. Optics and precision engineering, 2005, 13(2): 144-150. DOI：

摘要

针对红外气体探测器对光源的要求

结合现有MEMS(微机电系统)工艺及与其兼容的IC工艺

研制了一种可用于红外多气体传感器的脉冲式MEMS辐射光源。该光源主要有Si

/SiO

的复合支撑层和铂金发热电极组成

可以产生相当于黑体300~800 K的红外辐射

在温度

＝1 106 K时有

=2.62 μm峰值辐射波长;并且光源有足够强的辐射强度和2~15 μm红外辐射波段

能够满足大部分气体在2~14 μm波长范围内特征的吸收谱线的要求。经过对辐射元的动态测量可知

辐射源的动态调制频率可达到50 Hz

完全能够满足气体测量对所需红外光源调制频率的要求。

Abstract

A mid-IR thermal source based on electrical heating of platinum film is studied. The IR source with an effectively emitting area diameter of 1.6 mm is obtained from heated platinum thin film resistors that deposit on a Si

/SiO

membrane. It can emit wideband infrared light with a peak wavelength of

=2.62 μm at 1 106 K and adapt to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of various IR gas sensors

and it can be regarded as a new thermal IR source to be used in NDIR (non-dispersive infrared) gas analyzer.

关键词

Keywords

references

. MELENDEZ J,de CASTRO A J. Spectrally selective gas cell for electrooptical infrared compactmultigas sensor[J]. Sensor and Actuators A, 1995,46-47: 417-421.

. CORMAN T,KALVESTEN E,HUIKU M. An optical IR-source and CO2-chamber system for CO2 measurements[J]. Journal of Microelectromechanical Systems, 2000,9(4):509-516.

. PUTON J,JASEK K,SIODLOWSKI B,et al. Optimization of a pulsed IR source for NDIR gas analyzers[J]. Opto-electronics Review, 2002, 10(2): 97-103.

. LAINE D C,Al.JOURANI M M,CARPENTER S,et al. Pulsed wideband IR thermal source[J]. IEEE Proc-Optoelectron, 1997,144(5):315-322.

. 李守荣,梁平治,屈新萍. 红外微辐射元的研制[J]. 红外与毫米波学报,2003,22(4):277-280. LI SH R,LIANG P ZH,QU X P. Development of IR microemitter[J]. J. Infrared Millim. Wave, 2003,22(4):277-280.(in Chinese)

. BAUER D,HEEGER M,GEBHARD M,et al. Design and fabrication of a thermal infrared emitter[J]. Sensor and Actuators A, 1996,55:57-63.

. MASTRANGELO C H,HIS-JEN YEH J,et al.Electrical and optical characteristics of vacuum-sealed polysilicon microlamps[J]. IEEE Ransactions on Electron Devices, 1992,39(6):1363-1375.

. 陈衡编著.红外物理学[M]. 北京:国防工业出版社,1985:55-90. CHEN H. IR physics[M]. Beijing: National Defence and Industry of Publishing Company,1985:55-90.

. PUTON J,JASEK K,SIODLOWSKI B,et al.Platinum IR sources for gas monitors . 24th International Spring Seminar on Electronics Technology. Calimanesti-Caciulata, Romania, 2001:186-9192.

Views

362

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Analysis and optimization of a side pull-down electrodes controlled MEMS varactor

Design and modeling of MEMS-based solid propellant propulsion

Related Author

LIU Ze-wen

WEI Jia

WANG Yu

FANG Jie

LIU Li-tian

LI Zhi-jian

YOU Zheng

ZHANG Gao-fei

Related Institution

Institute of Microelectronics, Tsinghua University

Department of Precision Instruments and Mechanology, Tsinghua University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰