Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism

JIE De-gang; LIU Yan-jie; SUN Li-ning; SUN Shao-yun; CAI He-gao

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Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism

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- Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism
- Optics and Precision Engineering Vol. 13, Issue 2, Pages: 171-178(2005)
- 作者机构：
  
  哈尔滨工业大学机器人研究所,黑龙江哈尔滨 150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP242
- Received：16 February 2005，
  
  Revised：10 March 2005，
  
  Published Online：30 April 2005，
  
  Published：30 April 2005
- 稿件说明：
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JIE De-gang, LIU Yan-jie, SUN Li-ning, et al. Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism[J]. Optics and precision engineering, 2005, 13(2): 171-178.
DOI：

JIE De-gang, LIU Yan-jie, SUN Li-ning, et al. Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism[J]. Optics and precision engineering, 2005, 13(2): 171-178. DOI：

摘要

提出一种宏微双重驱动精密定位机构

采用高性能直线电机直接驱动宏动平台

实现系统大行程微米级精度定位;安装在宏动平台上的压电陶瓷驱动微动平台

实现纳米级的分辨率和定位精度

以高频响动态补偿系统的定位误差;采用精密光栅尺反馈微动平台输出端的位置信号

实现定位机构的全闭环反馈控制。在分别建立宏动、微动、宏微机构模型的基础上

提出复合型宏动控制和模糊自校正PID微动控制的宏微控制策略。实验研究表明:系统的动态和稳态性能良好

该定位机构的最大工作行程100 mm

稳定时间小于40 ms

重复定位精度10 nm。

Abstract

A macro-micro dual-drive ultra-precision positioning mechanism is presented. Combining macro with micro actuator

a system with large workspace and high resolution of motion was developed. The direct-drive motor is used in the macro motion

and PZT-driven micro stage with high frequency is mounted on the motor and compensates the position error. A high-resolution linear encoder is integrated into the closed-loop feedback

which is used to measure the position of the end-effector mounted in the micro stage. The feedforward and feedback are combined to control the macro stage

and the fuzzy-adaptive PID control algorithm is employed in the micro stage. The experimental results show that the travel range is 100 mm

the settling time is less than 40 ms and the repeatability error is 10 nm.

关键词

Keywords

references

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