Simulation and experimental study of non-contact piezoelectric micromotor

YANG Bin; LIU Jing-quan; CHEN Di; ZHOU Guang-hua; CAI Bing-chu

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Simulation and experimental study of non-contact piezoelectric micromotor

更新时间：2020-08-12

- Simulation and experimental study of non-contact piezoelectric micromotor
- Optics and Precision Engineering Vol. 13, Issue 2, Pages: 165-170(2005)
- 作者机构：
  
  上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室上海,200030
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM282
- Received：14 December 2004，
  
  Revised：06 February 2005，
  
  Published Online：30 April 2005，
  
  Published：30 April 2005
- 稿件说明：
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YANG Bin, LIU Jing-quan, CHEN Di, et al. Simulation and experimental study of non-contact piezoelectric micromotor[J]. Optics and precision engineering, 2005, 13(2): 165-170.
DOI：

YANG Bin, LIU Jing-quan, CHEN Di, et al. Simulation and experimental study of non-contact piezoelectric micromotor[J]. Optics and precision engineering, 2005, 13(2): 165-170. DOI：

摘要

提出了一种基于四区和八区2种激振方式的新型非接触压电微马达

并进行了振动模态的有限元数值模拟。利用ANSYS有限元软件对定子进行模态分析

并用激光测振仪对四区和八区2种激振方式下的定子进行位移扫频和振型测试

得出:最优驱动频率分别为34.4 kHz和46.3 kHz

相应的模态分别为

和

二者结果吻合较好。对微马达的输出性能进行了实验研究

结果表明:三叶片和六叶片转子在八区最优模态激振下转子的转速约是四区的2倍。说明了增加定子的分区数不仅改变了定子的最优驱动频率而且能够明显提高转子的转速。而且当A-B间相位差从90°调谐到270°时

行波的传播方向发生了改变

从而实现了转子的换向。实验还表明

转子的正反转的转速基本一致。

Abstract

A new non-contact piezoelectric micromotor was presented

based on four-sector and eight-sector excited by electric signals. The mode analysis of the stator was carried out to compute the natural frequency and the corresponding vibration mode by finite element method. The frequency sweep and the vibration mode test were done with a laser Doppler vibrometer. It is shown that the optimum driving frequencies of the stators divided into four-sector and eight-sector are 34.4 kHz and 46.3 kHz

and the corresponding vibration mode were

mode and

respectively. It is found that the finite element simulation results were in good agreement with experiment. The output characteristics of micromotor were tested. The conclusion is that the revolution speed of the optimum driving frequency of eight-sector is about double than four-sector for three blades and six blades rotors. These demonstrate that the increase of the sector number of stator can not only change the optimum driving frequency

but also increase the revolution speed of rotors obviously. When the difference between A and B phase is changed between 90°and 270°

the direction of the traveling wave along circumferential direction is shifted

so the rotation direction of rotor is also changed. the experiment shows that the non-contact piezoelectric micromotor offers identical performance to different rotation directions.

关键词

Keywords

references

. YAMAYOSHI Y, HIROSE S. Ultrasonic motor not using mechanical friction force[J]. International Journal of Applied Electromagnetics in Materials, 1992,3(3):179-182.

. HIROSE S,YAMAYOSHI Y,ONO H. A small non-contact ultrasonic motor . Ultrasonics Symposium, 1993:453-456.

. HU J H,NAKAMRA K,UEHA S. An analysis of a noncontact ultrasonic motor with an ultrasonically levitated rotor[J]. Ultrasonics, 1997,35(6):459-467.

. YAMAZAKI T. Trial construction of a non-contact ultrasonic motor with an ultrasonically levitated rotor[J]. Japanese Journal of Applied Physics, 1996,35(5): 3286-3288.

. HU J,YAMAZAKI T,NAKAMURA K,et al.Analyses of an ultrasonic motor driving fluid directly[J]. Japanese Journal of Applied Physics, 1995,34:2702-2706.

. 夏长亮,胡俊辉,史婷娜,等. 基于液体为媒质的非接触型超声波电机理论与实验研究[J]. 中国电机工程学报,2001,21(8):64-67. XIA CH L, HU J H, SHI T N, et al. Study on theory and experiment of non-contact type ultrasonic motor with fluid medium[J]. Proceedings of the CSEE, 2001, 21(8):64-67.(in Chinese)

. NAKAMURA K,MARUYAMA M,UEHA S.A New ultrasonic motor using electro-rheoligical fluid and torsional vibration[J]. Ulrasonics, 1996,34: 261-264.

. 刘景全,吴博达,杨志刚,等. 一种新型的圆筒非接触超声马达[J]. 声学学报,2001,26(2):113-116. LIU J Q,WU B D,YANG ZH G, et al. A new type of circular cylindrical non-contact ultrasonic motor[J]. Acta Acoustica, 2001,26(2):113-116.(in Chinese)

. HU J H. A study on noncontact high speed ultrasonic motor .Ph. D. Dissertation, Tokyo Institute of Technology, 1997.

. HU J H,LAI H,CHAN W,et al.A standing wave-type noncontact linear ultrasonic motor[J]. IEEE Transactions on UFFC, 2001, 48(3): 699-708.

. 刘景全,杨志刚,吴博达,等. 圆环驻波超声波马达振子的有限元分析与振型测试[J]. 光学精密工程,1998,6(3):56-61. LIU J Q,YANG ZH G,WU B D, et al. Finite-element analyses of a ring type ultrasonic motor and measurement of vibration mode[J]. Optics and Precision Engineering, 1998,6(3):56-61.(in Chinese)

. LAMBERTI N,IULA A,PAPPALARDO M. A piezoelectric motor using flexural vibration of a thin piezoelectric membrane[J]. IEEE Transactions on UFFC, 1998, 45(1): 23-29.

. 马建旭,吴清文,卢锷,等. 纵弯式压电微电机自然频率的有限元计算[J]. 光学精密工程,1997,5(6):81-85. MA J X,WU Q W,LU E, et al. Finite element analysis on natural frequency of longitudinal-bending piezoelectric micromotor[J]. Optics and Precision Engineering, 1997, 5(6):81-85.(in Chinese)

. GUO N,CAWLEY P. The finite element analysis of the vibration characteristics of piezoelectric discs[J]. J. Sound. Vibration., 1992, 159(1):115-137.

. 陈永校,郭吉丰. 超声波电动机[M]. 杭州:浙江大学出版社,1994. CHEN Y X, GUO J F. Ultrasonic motor[M]. Hangzhou:Zhejiang University Press, 1994. (in Chinese)

. UEHA S,TOMIKAWA Y,KUROSAWA M,et al. Ultrasonic motors theory an applications[M]. Clarendon Press, 1993.

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