Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector

XUE Ling-ling; CHEN Bo; NI Qi-liang; ZHANG Hua; CAO Ke; ZHANG Ling

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Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector

更新时间：2020-08-12

- Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector
- Optics and Precision Engineering Vol. 13, Issue 2, Pages: 225-230(2005)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春 130033
  2. 长春理工大学理学院,吉林长春 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP751
- Received：15 December 2004，
  
  Revised：08 January 2005，
  
  Published Online：30 April 2005，
  
  Published：30 April 2005
- 稿件说明：
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XUE Ling-ling, CHEN Bo, NI Qi-liang, et al. Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector[J]. Optics and precision engineering, 2005, 13(2): 225-230.
DOI：

XUE Ling-ling, CHEN Bo, NI Qi-liang, et al. Experimental study of the resolution of an optoelectronic imaging system at 17.1 nm based on MCP detector[J]. Optics and precision engineering, 2005, 13(2): 225-230. DOI：

摘要

设计了17.1 nm波段光电成像系统

用于对波长为17.1 nm的极紫外光进行成像。该成像系统分为三大部分:光源、单色仪和探测系统。一个调Q的Nd∶YAG激光器(Continuum 9000)用来产生激光等离子体

掠入射单色仪由2块球面聚焦镜和1块600 L/mm的球面掠入射光栅组成

经单色仪分光后得到波长为17.1 nm的单色光

探测器是微通道板(MCP)和荧光屏组件共同组成

Kodak400型胶卷被用于记录狭缝的像。结果获得了一宽度为3 mm的狭缝的像

实验测得130 μm的成像系统的空间分辨率

好于相同条件下文献[6]的结果。

Abstract

An optoelectronic imaging system was designed to image EUV light at 17.1 nm. This imaging system is composed of three parts: light source

monochromator and detection system. A Q-modulated Nd-YAG laser (Continuum 9000) is used to produce laser plasma. The grazing monochromator consists of two spherical mirrors and a spherical grazing grating

by which monochromatic light at 17.1 nm is obtained and the detector is a MCP(Microchannel Plate) and phosphor screen assembly. Kodak 400 film is used to record the image of a 3 mm-width-slit obtained by this imaging system. Its spatial resolution of 130 μm is demonstrated in this paper

which is better than that of reference [6].

关键词

Keywords

references

. TIMOTHY S,BENDOER W,EDWARD J,et al.New frontiers in 21st century microchannel plate (MCP) technology: bulk conductive MCP-based image intensifiers[J].SPIE,2000,4128:5-13.

. BENDER E J,ESTRERA J P,FORD C E,et al. High-reliability GaAs image intensifier with unfilmed microchannel plate[J]. SPIE, 1999, 3749: 713-714.

. DICICCO D S,KIM D,ROSSER R,et al.First stage in the development of a soft-X-ray reflection imaging microscope in the Schwarzschild configuration using a soft-X-ray laser at 18.2 nm[J]. Opt.Lett.,1992,17(2):157-159.

. KENTER A,CHAPPELL J H,KRAFT R,et al. In-flight performance and calibration of the chandra high resolution camera imager[J]. SPIE, 2000,4012:467-489.

. VALLERGA J V. Six years in orbit: the MCP detectors aboard the extreme ultraviolet explorer satellite[J]. SPIE,1998,3356:1001-1010.

. GRANTHAM S,MIESAK E,REESE P,et al. Optimal MCP configuration for use in high speed, high resolution X-ray imaging[J].SPIE,1994,2273: 108-117.

. 武旭华,朱永田,王磊. 高分辨率阶梯光栅光谱仪的光学设计[J]. 光学精密工程,2003,11(5):442-446. WU X H,ZHU Y T,WANG L.Optical design of high resolution echelle spectrogaph .Oplics and Precision Engineoring,2003,11(5):442-446.(in Chinese)

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