Impact drive rotary precision actuator by piezoelectric bimorphs

ZHANG Hong-zhuang; ZENG Ping; HUA Shun-ming; CHENG Guang-ming; YANG Zhi-gang

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Impact drive rotary precision actuator by piezoelectric bimorphs

更新时间：2020-08-12

- Impact drive rotary precision actuator by piezoelectric bimorphs
- Optics and Precision Engineering Vol. 13, Issue 3, Pages: 298-304(2005)
- 作者机构：
  
  吉林大学机械科学与工程学院,吉林长春 130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384;TH703.6
- Received：02 March 2005，
  
  Revised：12 April 2005，
  
  Published Online：30 June 2005，
  
  Published：30 June 2005
- 稿件说明：
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ZHANG Hong-zhuang, ZENG Ping, HUA Shun-ming, et al. Impact drive rotary precision actuator by piezoelectric bimorphs[J]. Optics and precision engineering, 2005, 13(3): 298-304.
DOI：

ZHANG Hong-zhuang, ZENG Ping, HUA Shun-ming, et al. Impact drive rotary precision actuator by piezoelectric bimorphs[J]. Optics and precision engineering, 2005, 13(3): 298-304. DOI：

摘要

研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元的新型惯性冲击式旋转精密驱动器。对自由端带有集中质量的悬臂式压电双晶片的动态特性进行了有限元法和实验分析

提出了压电双晶片型惯性冲击式精密驱动器特定的定频调压驱动方法。对压电双晶片型惯性冲击式旋转精密驱动器进行了性能测试

驱动器旋转行程为180°、旋转步长分辨力为1μrad、最大转速为0.2 rad/min、最大扭矩为0.02 Nm。该驱动器结构简单

特别是成本为传统惯性冲击式驱动器的1/100左右。

Abstract

An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorph

a certain method of fixed-frequency and adjustable-amplitude are confirmed to control the actuator. The results show that the actuator excited by fixed-frequency and adjustable-amplitude ramp voltage waveform work with large travel range(180°)

high resolution(1 μrad) and speed(0.2 rad/min) and heavy-load ability(0.02 Nm). Having the advantages of high-precision positioning ability

simple structure and only one percent cost of traditional impact drive mechanism

it is expected that the proposed actuator will be widely applied to precision industry.

关键词

Keywords

references

. LIU Y T, WANG C W. A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator[J]. Sensors and Actuators A,2002, 102:83-92.

. 华顺明, 程光明, 阚君武,等. 压电精密位移驱动器的研究进展[J]. 压电与声光, 2004,26(3):192-195. HUA SH M,CHENG G M,KAN J W,et al.The current research on the piezoelectric actuators for precision displacement [J]. Piezoelectrics and Acoustooptics, 2004, 26(3):192-195. (in Chinese)

. 孙立宁,刘品宽,吴善强等. 管内移动微型机器人研究与发展现状[J]. 光学精密工程,2003, 11(4):326-332. SUN L N,LIU P K,WU SH Q,et al. Status and development of in-pipe micro robots[J]. Optics and Precision Engineering, 2003, 11(4):326-332.(in Chinese)

. WU T, PAUL I R. Dynamic peak amplitude analysis and bonding layer effects of piezoelectric bimorph cantilevers[J]. Smart Materials and Structures, 2004, 13(1):203-210.

. MORITA T, YOSHIDA R, OKAMOTO Y, et al. Three DOF parallel link mechanism utilizing smooth impact drive mechanism [J]. Journal of the International Societies for Precision Engineering and Nanotechnology,2002,26(3):289-295.

. 迟冬祥,颜国正,丁国清. 基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究[J]. 光学精密工程,2001, 9(2):135-138. CHI D X,YAN G ZH,DING G Q. Inertia-friction based 4 D.O.F. microactuator driven by PZT[J].Optics and Precision Engineering, 2001,9(2):135-138.(in Chinese)

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