Performance of a serial-connection multi-chamber piezoelectric micropump

KAN Jun-wu; XUAN Ming; LIU Guo-jun; YANG Zhi-gang; WU Yi-hui

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Performance of a serial-connection multi-chamber piezoelectric micropump

更新时间：2020-08-12

- Performance of a serial-connection multi-chamber piezoelectric micropump
- Optics and Precision Engineering Vol. 13, Issue 5, Pages: 535-541(2005)
- 作者机构：
  
  1. College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China
  2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130025, China
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：16 April 2005，
  
  Revised：27 June 2005，
  
  Published Online：30 October 2005，
  
  Published：30 October 2005
- 稿件说明：
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KAN Jun-wu, XUAN Ming, LIU Guo-jun, et al. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. Optics and precision engineering, 2005, 13(5): 535-541.
DOI：

KAN Jun-wu, XUAN Ming, LIU Guo-jun, et al. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. Optics and precision engineering, 2005, 13(5): 535-541. DOI：

摘要

The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump

which can be manufactured using conventional production techniques and materials

has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase

as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators

but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.

Abstract

The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump

which can be manufactured using conventional production techniques and materials

has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase

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Keywords

references

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