Design and test of a micro -displacement actuator

LI Guo-Ping; MIAO Xin-Li

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Design and test of a micro -displacement actuator

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- Design and test of a micro -displacement actuator
- Optics and Precision Engineering Vol. 13, Issue 3, Pages: 332-338(2005)
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院国家天文台南京天文光学技术研究所,江苏南京 210042
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH751;TH703.6
- Received：22 February 2005，
  
  Revised：08 April 2005，
  
  Published Online：30 June 2005，
  
  Published：30 June 2005
- 稿件说明：
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LI Guo-Ping, MIAO Xin-Li. Design and test of a micro -displacement actuator[J]. Optics and precision engineering, 2005, 13(3): 332-338.
DOI：

LI Guo-Ping, MIAO Xin-Li. Design and test of a micro -displacement actuator[J]. Optics and precision engineering, 2005, 13(3): 332-338. DOI：

摘要

设计制造了一套微位移促动器并进行了检测。比较了常用的实现高精度、大行程的微位移机构的工程方法

并结合大天区面积多目标光纤光谱天文望远镜(LAMOST)微位移调节机构的实现原理

采用步进电机驱动减速器、精密丝杆型式

及高精度的杠杆缩放结构

实现了高精度、大行程的微位移促动器。根据该传动机构的特点

对机构的误差进行了分析

通过计算机查表校正丝杆的传动误差。双频激光干涉仪的检测结果表明该微位移促动器在行程范围内灵敏度达到了201 nm±48 nm

步长为10 μm

单向精度达到了标准偏差237 nm。

Abstract

A set of micro-displacement actuator was developed and tested for the large area multi-object fiber spectroscopic telescope(LAMOST). Conventional techniques for micro-displacement mechanism with high accuracy and long travel in engineering applications are studied. In view of implementation principle of the active-motion mechanism in the LAMOST

integrated with precision lever

a scheme of stepper motor

harmonic reducer and ball screw

the goal of both high accuracy and long travel is realized. The origins of error are investigated

before a computer look-up table is designed to calibrate transmission error and to improve absolute accuracy of the actuator. Measured with laser interferometer in laboratory

the actuator confirms itself that it can be used as micro-displacement actuator of the LAMOST

thanks to its resolution of 201 nm±48 nm and unidirectional accuracy of 237 nm(standard deviation) at a step of 10 μm.

关键词

Keywords

references

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