Novel sophisticated stepping linear piezoelectric actuator

LIU Guo-song; ZHAO Hong-wei; ZENG Ping; CHENG Guang-ming; YANG Zhi-gang

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Novel sophisticated stepping linear piezoelectric actuator

更新时间：2020-08-12

- Novel sophisticated stepping linear piezoelectric actuator
- Optics and Precision Engineering Vol. 13, Issue 3, Pages: 291-297(2005)
- 作者机构：
  
  吉林大学机械科学与工程学院,吉林长春 130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384;TH703.6
- Received：06 February 2005，
  
  Revised：18 April 2005，
  
  Published Online：30 June 2005，
  
  Published：30 June 2005
- 稿件说明：
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LIU Guo-song, ZHAO Hong-wei, ZENG Ping, et al. Novel sophisticated stepping linear piezoelectric actuator[J]. Optics and precision engineering, 2005, 13(3): 291-297.
DOI：

LIU Guo-song, ZHAO Hong-wei, ZENG Ping, et al. Novel sophisticated stepping linear piezoelectric actuator[J]. Optics and precision engineering, 2005, 13(3): 291-297. DOI：

摘要

以压电叠堆为驱动元件

设计了新型的步进型精密直线驱动器。驱动器由于设计了独特的双侧对称箝位结构

可以利用精调斜块准确调整箝位面与动子的配合间隙

同时采用整体加工的柔性结构

保证了工作的稳定性和准确性。应用有限元分析方法对步进型精密直线驱动器进行了力学分析

并进行了大量的试验研究。试验测试结果表明:驱动器的分辨率达到40 nm、行程18 mm、驱动速度达到6 mm/min

可牵引150 g的载荷。

Abstract

A novel sophisticated stepping linear piezoelectric actuator was designed based on piezoelectric stack as actuator element. Because of used unique double symmetric anchoring/loosing

tolerance clearance between anchoring/loosing and runner is modulated precisely by using oblique blocks

meanwhile

applying flexible structure of overall structure processing ensures stability and accuracy of actuator. Mechanical properties of the stepping linear sophisticated piezoelectric actuator are analysed with finite element method and a number of experiments were carried out. The results of test suggest actuator has a resolution of 40 nm

travel of 18 mm

velocity of 6 mm/min and loading capacity of 150 g.

关键词

Keywords

references

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