A novel absorptive thin film for laser welding in optoelectronic device capsulation
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A novel absorptive thin film for laser welding in optoelectronic device capsulation
Optics and Precision EngineeringVol. 13, Issue 4, Pages: 492-499(2005)
作者机构:
State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-Sen University, Guangzhou 510275,China
作者简介:
基金信息:
DOI:
CLC:
Received:06 June 2005,
Revised:16 June 2005,
Published Online:30 August 2005,
Published:30 August 2005
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JIANG Shao-ji, JIN Tao, LI Wei-duo, et al. A novel absorptive thin film for laser welding in optoelectronic device capsulation[J]. Optics and precision engineering, 2005, 13(4): 492-499.
DOI:
JIANG Shao-ji, JIN Tao, LI Wei-duo, et al. A novel absorptive thin film for laser welding in optoelectronic device capsulation[J]. Optics and precision engineering, 2005, 13(4): 492-499.DOI:
A novel absorptive thin film for laser welding in optoelectronic device capsulation
A kind of absorptive thin film was designed and used in laser welding of SiO
2
Si and LiNbO
3
. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result
the damage of the parent materials
which is suffered from laser transmission
was avoided; On the other hand
mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
Abstract
A kind of absorptive thin film was designed and used in laser welding of SiO
2
Si and LiNbO
3
. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result
the damage of the parent materials
which is suffered from laser transmission
was avoided; On the other hand
mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
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references
. TU KN.Cu/Sn interfacial reactions: thin-film case versus bulk case[J].Materials Chemistry and Physics.1996,46:217-223.
. CH.C.Lee,Y.CH.Chen.High temperature tin-copper joints produced at low process temperature for stress reduction[J]. Thin Solid Films.,1996,286:213-218.
. CH.C.Lee,S.Choe.Fluxless In-Sn bonding process at 140℃[J].Materials Chemistry and Physics.,2002,A333:45-50.
. CH.Luo,L.Lin.The application of nanosecond-pulse laser welding technology in MEMS packaging with a shadow mask[J].Sensors and Actuators,2002,A97-98:398-404.
. Y.ZH.Cao,X.F.Hu.Absorbing film on metal for solar selective surface[J].Thin Solid Films.,2000,375:155-158.
. V.T.Bly,C.J.Thomas.Infrared absorber for ferroelectric detectors[J].Applied Optic.,1994,33:26-30.
. J.J.Monzón,L.L.Sánchez-SOTO.Optical performance of absorber structures for thermal detectors[J].Applied Optic.,1994,33:5137-5141.
. F.Lemarquis,G.Marchand.Analytical achromatic design of metal-dielectric absorbers[J].Applied Optic.,1999,38:4876-4884.
. Y.F.Zheng,K.Kikuchi,M.Yamasaki,K.Sonoi.Two-layer wideband antireflection coatings with an absorbing layer[J].Applied Optics.,1997,36:6335-6338.
. M.Cathelinaud,F.Lemarquis,C.Amra.Index determination of opaque and semitransparent metallic films: application to light absorbes[J].Applied Optic,2002,41:2546-2554.
. H.A.Macleod.Thin-film optical filter, 2nd edition[M]. McGraw-Hill, New York, 1989.