Research and development of VUV optical coatings for micro mirror applications

Ming-hong Yang; Alexandre Gatto; Norbert Kaiser

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Research and development of VUV optical coatings for micro mirror applications

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- Research and development of VUV optical coatings for micro mirror applications
- Optics and Precision Engineering Vol. 13, Issue 4, Pages: 465-470(2005)
- 作者机构：
  
  Fraunhofer IOF, Albert-Einstein-Str. 7, D-07745 Jena, Germany
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：06 June 2005，
  
  Revised：16 June 2005，
  
  Published Online：30 August 2005，
  
  Published：30 August 2005
- 稿件说明：
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Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. Optics and precision engineering, 2005, 13(4): 465-470.
DOI：

Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. Optics and precision engineering, 2005, 13(4): 465-470. DOI：

摘要

This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS

such as spatial light modulators (SLM) and micro scanning mirrors.

Abstract

such as spatial light modulators (SLM) and micro scanning mirrors.

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Keywords

references

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