Experimental investigation of laser-produced-plasma EUV source based on liquid target

QI Li-hong; NI Qi-liang; CHEN Bo

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Experimental investigation of laser-produced-plasma EUV source based on liquid target

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- Experimental investigation of laser-produced-plasma EUV source based on liquid target
- Optics and Precision Engineering Vol. 13, Issue 5, Pages: 604-607(2005)
- 作者机构：
  
  1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun,China,130033
  2. Graduate School of the Chinese Academy of Sciences Beijing,China,100039
  3. Institute of Atomic and Molecular Physics, Jilin University Changchun,China,130026
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：06 June 2005，
  
  Revised：27 June 2005，
  
  Published Online：30 October 2005，
  
  Published：30 October 2005
- 稿件说明：
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QI Li-hong, NI Qi-liang, CHEN Bo. Experimental investigation of laser-produced-plasma EUV source based on liquid target[J]. Optics and precision engineering, 2005, 13(5): 604-607.
DOI：

QI Li-hong, NI Qi-liang, CHEN Bo. Experimental investigation of laser-produced-plasma EUV source based on liquid target[J]. Optics and precision engineering, 2005, 13(5): 604-607. DOI：

摘要

A laser-produced plasma(LPP) source was built using liquid as target and a Nd:YAG laser as the irradiation laser

and the LPP source's radiation with ethanol and acetone target respectively was measured by an AXUV100 silicon photodiode combined with a McPHERSON model 247 grazing incidence monochromator of the resolution Δλ≤0.075 nm and the wavelength scanning interval 0.5 nm. Both ethanol and acetone target LPP source had EUV emission at 11~20 nm wavelength. The comparison between the spectra of the two kinds of target materials shows that all the two kinds of target source's spectra are the result of oxygen ions' transitions under current source's parameters

but the spectrum intensity from different target sources is different. The spectra intensity from the ethanol target is higher than that from the acetone target. In addition

the target liquid is forced into the vacuum chamber by the background pressure supported by the connected external high pressure gas

and the influence of the background pressure on the source's intensity is investigated.

Abstract

A laser-produced plasma(LPP) source was built using liquid as target and a Nd:YAG laser as the irradiation laser

but the spectrum intensity from different target sources is different. The spectra intensity from the ethanol target is higher than that from the acetone target. In addition

the target liquid is forced into the vacuum chamber by the background pressure supported by the connected external high pressure gas

and the influence of the background pressure on the source's intensity is investigated.

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Keywords

references

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