Research of micro-driven table based on PZT and its control system

YAN Zu-gen; SUN Li-ning; JIE De-gang

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Research of micro-driven table based on PZT and its control system

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- Research of micro-driven table based on PZT and its control system
- Optics and Precision Engineering Vol. 13, Issue 6, Pages: 703-708(2005)
- 作者机构：
  
  哈尔滨工业大学机器人研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP242
- Received：22 May 2005，
  
  Revised：08 September 2005，
  
  Published Online：30 December 2005，
  
  Published：30 December 2005
- 稿件说明：
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YAN Zu-gen, SUN Li-ning, JIE De-gang. Research of micro-driven table based on PZT and its control system[J]. Optics and precision engineering, 2005, 13(6): 703-708.
DOI：

YAN Zu-gen, SUN Li-ning, JIE De-gang. Research of micro-driven table based on PZT and its control system[J]. Optics and precision engineering, 2005, 13(6): 703-708. DOI：

摘要

介绍了基于偏摆误差补偿的高速高精度机器人系统组成及偏摆误差补偿原理

利用有限元分析软件ANSYS

设计了双层平行板弹性铰链结构、压电陶瓷(PZT)直接驱动的微位移工作台。采用模糊PI控制算法对微动工作台进行闭环控制

既利用模糊控制灵活、适应性强的优点

又利用PI控制精度高的优点。实验结果验证了模糊PI控制算法的有效性

采用微动工作台补偿偏摆误差

机器人的运动性能得到较大提高。

Abstract

The high-speed high-precision robot based on error compensation was presented. The micro-driven table was designed by means of ANSYS. The table consisted of a parallel board framework and direct-driven by PZT which integrated high-resolution strain transducer. Experiments demonstrate that the steady time of the micro-driven table has been shortened significantly by adopting the fuzzy PI controller

and the motion performance index of robot is improved by using the micro-driven table to compensate the swing displacement

关键词

Keywords

references

. 节德刚,刘延杰,孙立宁,等. 一种宏微双重驱动精密定位机构的建模与控制 . 光学精密工程,2005,4:171-177. JIE D G,LIU Y J,SUN L N.Modeling and control of a macro-micro dual-drive ultra-precision positioning mechanism[J].Optics and Precision Engineering,2005,4:171-177.(in Chinese)

. RAHMAN M,HEIKKALA J,LAPPALAINEN K. Modeling,measurement and error compensation of multi-axis machine tools[J].International Journal of Machine Tools & Manufacture,2002,40:1535-1546.

. 刘品宽,孙立宁,荣伟彬. 新型智能电化学微加工系统的研究[J]. 高技术通讯,2002,(6):83-87. LIU P K,SUN L N,RONG W B.Research on the system of electrochemical micromachining[J]. High Technology Letters,2002,(6):83-87.(in Chinese)

. XU W, KING T. Flexure hinges for piezoactuator displacement amplifiers:flexibility, accuracy and stress considerations [J]. Precision Engineering,1996.19(1):4-10.

. 孙立宁,孙绍云,曲东升,等. 基于PZT的微驱动一系统及控制方法的研究[J]. 光学精密工程,2004,12(2):55-59. SUN L N,SUN SH Y,QU D SH.Micro-drive positioning system based on PZT and its control[J].Optics and Precision Engineering,2004,12(2):55-59.(in Chinese)

. WOO ZH W,CHUNG H Y,LIN J J. A PID type fuzzy controller with self-tuning scaling factors . Fuzzy Sets and Systems,2000:321-326.

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