Error analysis on the parameters of non-coaxial grazing X-ray microscope

ZHAO Ling-ling; HU Jia-sheng; Li Xiang

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Error analysis on the parameters of non-coaxial grazing X-ray microscope

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- Error analysis on the parameters of non-coaxial grazing X-ray microscope
- Optics and Precision Engineering Vol. 14, Issue 1, Pages: 34-42(2006)
- 作者机构：
  
  大连理工大学电子与信息工程学院,辽宁大连 116024
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH742.63
- Received：22 October 2005，
  
  Revised：28 November 2005，
  
  Published Online：20 February 2006，
  
  Published：20 February 2006
- 稿件说明：
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ZHAO Ling-ling, HU Jia-sheng, Li Xiang. Error analysis on the parameters of non-coaxial grazing X-ray microscope[J]. Optics and precision engineering, 2006, 14(1): 34-42.
DOI：

ZHAO Ling-ling, HU Jia-sheng, Li Xiang. Error analysis on the parameters of non-coaxial grazing X-ray microscope[J]. Optics and precision engineering, 2006, 14(1): 34-42. DOI：

摘要

设计了一套由4个反射镜组成的非共轴掠入射X射线显微镜

分析了该系统的像差和成像质量。为了研制出高质量的设备

需要制定合理的加工和装配公差。研究了由于元件和结构参数(反射镜的半径

物距

掠入射角等)的误差而引起的高斯参数和像差的变化。首次用点列图和调制传递函数来定量评价图像质量降低的程度

并在此基础上制定了合理的加工和装配公差。在这些公差的约束下

研制成一套非共轴掠入射X射线显微镜

在激光引爆的惯性约束聚变的诊断实验中

用该系统获得了高质量的图像。

Abstract

A set of non-coaxial grazing X-ray microscope consisting of four spherical mirrors was designed for diagnosis of ICF

and the aberrations and imaging quality of the microscope were analyzed. In order to acquire excellent image quality

It is necessary for manufacturing and assembling the microscope to set up the reasonable tolerances. In this paper

the changes of Gauss parameters and aberrations caused by component and subsystem parameters

such as the mirror's radius

the angle between mirrors

grazing angle

object distance

etc.

were studited

and the spot diagrams and MTF were firstly adopted for evaluating quantitatively image quality of the microscope. The reasonable manufacturing tolerances of components and assembly tolerances of the system were established based on the discussion and analysis above. A set of non-coaxial grazing X-ray microscope has been manufactured under confinement of the tolerances. In site test of ICF

the images with high resolution are obtained by the microscope.

关键词

Keywords

references

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