a technique expressed by Zernike’s circle polynomials was developed to test and separate the unsymmetrical error of null lens. By turning the null lens or the tested surface in different angles along their optic axis
the different testing results were obtained. According to these results
the wavefront aberration’s unsymmetrical coefficients of Zernike’s circle polynomials caused by the error of null lens were obtained
then a corrective file to correct the last testing result can be given. With this technique
the demands on the material
manufacturing
and assembly of null lens is not so critical
and the test accuracy is improved observably. The experimental results show
before and after the correction technique is used
the test result is 0.105λ and 0.026λ
respectively
and the difference among four testing results of the mirror in four different orientations is less than 0.001λ
so that the technique has been successfully applied to test a hyperboloid convex surface.
关键词
Keywords
references
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. STAHL P. Aspheric surface testing techniques[J]. SPIE,1996,1332:66-76.
. 卢振武,刘华,李凤有,等. 利用曲面计算全息图进行非球面检测[J]. 光学 精密工程,2004,12(6),555-559. LU Z W,LIU H,LI F Y,et al.A spheric surface testing with CGH on curved surface[J]. Optics and Precision Engineering,2004,12(6):555-559.(in Chinese)