Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography

JIANG Ming; YANG Fu-jun; DONG E-liang; ZHENG Xiang; HE Xiao-yuan

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Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography

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- Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography
- Optics and Precision Engineering Vol. 14, Issue 1, Pages: 121-126(2006)
- 作者机构：
  
  1. 苏州科技学院土木系,江苏苏州,215011
  2. 东南大学土木学院,江苏南京,210096
- 作者简介：
- 基金信息：
- DOI：
  CLC： O318
- Received：22 September 2005，
  
  Revised：18 November 2005，
  
  Published Online：20 February 2006，
  
  Published：20 February 2006
- 稿件说明：
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JIANG Ming, YANG Fu-jun, DONG E-liang, et al. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Optics and precision engineering, 2006, 14(1): 121-126.
DOI：

JIANG Ming, YANG Fu-jun, DONG E-liang, et al. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Optics and precision engineering, 2006, 14(1): 121-126. DOI：

摘要

针对微机械陀螺特征尺寸小、振动频率高

其动态特性难以精确评价的问题

提出了基于高速摄像技术、显微技术与数字图像相关技术的测试方案。并用此方法测量了双线性振动陀螺的固有频率、品质因子、—阶模态振型和杨氏模量。实验数据表明

系统分辨率可达0.01 μm

不同驱动频率下所测振子响应频率误差小于0.023%。

Abstract

To evaluate the dynamic characteristics of Micro-Gyroscope with small dimension and high vibration frequency

a new measurement setup based on the high speed camera armed with microscope and digital image technique was presented.The natural frequency

quality factor

first mode of fold beam and Young’s modulus of the double linear vibratory gyroscope were measured by the new setup. The experimental results show the sensitivity of this setup is up to 0.01 μm and relative errors in different driving frequencies are less than 0.023%.

关键词

Keywords

references

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Related Institution

苏州科技学院土木学院

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