Study of matching methods for error evaluation of optical free-form surface
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Study of matching methods for error evaluation of optical free-form surface
Optics and Precision EngineeringVol. 14, Issue 1, Pages: 133-138(2006)
作者机构:
哈尔滨工业大学 深圳研究生院,广东 深圳,518055
作者简介:
基金信息:
DOI:
CLC:TQ171.6+5
Received:16 September 2005,
Revised:24 October 2005,
Published Online:20 February 2006,
Published:20 February 2006
稿件说明:
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DU Jian-jun, GAO Dong, KONG Ling-bao, et al. Study of matching methods for error evaluation of optical free-form surface[J]. Optics and precision engineering, 2006, 14(1): 133-138.
DOI:
DU Jian-jun, GAO Dong, KONG Ling-bao, et al. Study of matching methods for error evaluation of optical free-form surface[J]. Optics and precision engineering, 2006, 14(1): 133-138.DOI:
Study of matching methods for error evaluation of optical free-form surface
The matching methods between measuring surface and design surface were studied for the profile error evaluation of free-form surface. Based on the matching together of both center points and normal vectors of measuring surface and design surface
a pre-position method by five feature points including center point and four corner points was put forward to achieve better preliminary matching. The dual optimization method integrating the least square method and the least condition principle was presented for the accurate positioning. The results show that the matching accuracy can achieve the nanometer level. At last
an actual test of aspheric surface proves the validity of methods.
关键词
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references
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