Analysis of groove density for diffraction grating during bending

LIU Bin; WANG Qiu-ping; XU Xiang-dong; FU Shao-jun

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Analysis of groove density for diffraction grating during bending

更新时间：2020-08-12

- Analysis of groove density for diffraction grating during bending
- Optics and Precision Engineering Vol. 14, Issue 2, Pages: 224-228(2006)
- 作者机构：
  
  中国科学技术大学国家同步辐射实验室,安徽合肥,230026
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：08 October 2005，
  
  Revised：14 January 2006，
  
  Published Online：30 April 2006，
  
  Published：30 April 2006
- 稿件说明：
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LIU Bin, WANG Qiu-ping, XU Xiang-dong, et al. Analysis of groove density for diffraction grating during bending[J]. Optics and precision engineering, 2006, 14(2): 224-228.
DOI：

LIU Bin, WANG Qiu-ping, XU Xiang-dong, et al. Analysis of groove density for diffraction grating during bending[J]. Optics and precision engineering, 2006, 14(2): 224-228. DOI：

摘要

理论上给出了光栅在子午面内弯曲为任意面形后

光栅线密度的变化关系

并采用有限元分析软件ABAQUS/Standard进行了模拟分析。理论与模拟分析的结论说明

压弯后光栅线密度是由光栅本身参数及压弯面形严格决定的。在此基础上设计一个简单的单色器

并在数值上给出了压弯后光栅线密度变化对单色器件性能的影响。由于光栅面形及其线密度的变化

不仅对光栅成像的聚焦特性有所改善

对彗差等高阶次像差的影响也是不可忽略的。

Abstract

In order to derive the effect of an arbitrary bending curve in tangential orientation on a grating

a general expression about the transform of groove density was represented in theory

and simulated by Finite Element Method(FEM) using ABAQUS/Standard. The results show that the groove density was severely determined by the attribute of diffractive grating and bending curve. Sequentially

the imaging properties of grating monochromator due to bending were numerically pointed out with a simple example. As a result of shape change and groove density variation

it not only improves the focusing condition

but also affectes higher order aberrations such as coma aberration of the imaging system.

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Keywords

references

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. PALMER C,MCKINNEY W R. Imaging properties of varied line-space (VLS) gratings with adjustable curvature[J].SPIE, 1998, 3450: 87-102.

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. 柳晖,高雪官. 同步辐射单色器冷却压弯机构[J]. 光学精密工程, 2004, 12(6): 608-613. LIU H, GAO X G, Monochromator cooling bender in synchrotron radiation[J]. Optics and Precision Engineering, 2004, 12(6): 608-613. (in Chinese)

. MALCOM R,CAMBIE H D,DUARTE R M. Theory and practice of elliptically bent X-ray mirros[J]. Opt. Eng., 2000, 39(10): 2748-2762.

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