Fabrication of a controllable curved surface grating

HE Shi-ping; YE Chao; XIE Yong-jun; FU Shao-jun

doi:null

您当前的位置：

首页 >

文章列表页 >

Fabrication of a controllable curved surface grating

更新时间：2020-08-12

- Fabrication of a controllable curved surface grating
- Optics and Precision Engineering Vol. 14, Issue 2, Pages: 197-201(2006)
- 作者机构：
  
  1. 中国科学技术大学国家同步辐射实验室,安徽合肥,230026
  2. 中国科学技术大学力学和机械工程系,安徽合肥,230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：22 October 2005，
  
  Revised：18 January 2006，
  
  Published Online：30 April 2006，
  
  Published：30 April 2006
- 稿件说明：
移动端阅览
HE Shi-ping, YE Chao, XIE Yong-jun, et al. Fabrication of a controllable curved surface grating[J]. Optics and precision engineering, 2006, 14(2): 197-201.
DOI：

HE Shi-ping, YE Chao, XIE Yong-jun, et al. Fabrication of a controllable curved surface grating[J]. Optics and precision engineering, 2006, 14(2): 197-201. DOI：

摘要

提出了一种制作曲面变间距光栅的方法。首先在平面基片上制作光栅

然后通过一种高分子材料(PDMS)作为载体将光栅转移到曲面上

而事先涂在曲面上的混合溶胶-凝胶取代了传统的光刻胶

使得光栅的制作效率大大提高。采用这种方法在曲率半径为100 mm的凹球面基底上制作了平均线密度为80 l/mm的光栅

并用环境扫描电镜以及数字图像处理法检测了光栅的线密度分布。检测结果表明:光栅质量好

条纹清楚

衍射效率也没有降低。所制曲面光栅具有平面光栅和透镜两种光学器件的功能

可用曲面变间距光栅一种光学元件取代透镜和平面光栅两种光学元件

简化了光路

提高了制作效率

降低了成本。

Abstract

A fabrication method of VLSG(Varied-line-space Grating) was presented. The grating was fabricated on plane substrate

and then it was transferred on curved surface by a macromolecule material(PDMS) used as a carrier. The hybrid gel film on curved surface can replace traditional light-sensitive lacquer

and improve the grating's stability. The VLSG with the line density of 80 l/mm was fabricated on a concave lens surface with curved radius of 100 mm. The grating line density distribution was detected with SEM and digital image process technique. For having the functions of the lens and plane grating

the results show that the high quality grating can replace lens and plane grating in good processing

efficiency and cost.

关键词

Keywords

references

. 王炜,杨厚民. 平面变栅距光栅的原理及设计[J]. 光学学报,1999,19(9):1158-1162. WANG W,YANG H M.Principle and design of varied line-space plane gratings[J].Acta Optica Sinica ,1999,19(9):1158-1162.(in Chinese)

. NAMIOKA T,KOIKE M. Aspheric wave-front recording optics for holographic gratings[J]. Appl. Opt., 1995, 34:2180-2186.

. 朱向冰,付绍军,叶为全,等. 消像差光栅的理论及实验研究[J]. 光学精密工程,2003,11(4):354. ZHU X B,FU SH J,YE W Q,et al.The theory,design,manufacture and measurement of aberration reduced gratings[J].Optics and Precision Engineering,2003,11(4):354.(in Chinese)

. 朱向兵,何世平,付绍军. 云纹法检测变间距光栅的线密度[J]. 光学精密工程,2002,10(3):285-289. ZHU X B,HE SH P,FU SH J. Measurement of the line-density of varied-line-space grating by Moiré fringe[J].Optics and Precision Engineering,2002,10(3):285-289.(in Chinese)

. XIE Y J,FU SH J,HE SH P.Fabrication of varied-line-spacing grating by elastic medium[J]. Opt. Express,2004,12:3894-3899.

. NAJAFI S C,TOUAM T,SARA R,et al.Sol-sel glass waveguide and grating on silicon[J].LightwaveTechnol,1998,16:1640-1646.

. COUDRY P,ETIENNE Y,MOREAU J,et al.Sol-gel channel waveguide on silicon:fast direct imprinting and low cost fabrication[J].Opt.Commun,1997,143:199-202.

Views

485

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Efficient diffusers with surface disordered submicron structures

Design and fabrication of flexible MEMS anti-drag skin

Related Author

WANG Min

XUE Xu-feng

YE Xiong-ying

LI Yong

LI Wen-ping

ZHU Xiao-gu

Related Institution

State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instrument, Tsinghua University

Department of Precision Instruments and Mechanology, Tsinghua University

State Key Laboratory of Tribology, Tsinghua University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰