Design and analysis of 1-DOF nano-positioning stage

DAI Rong; XIE Tie-bang

doi:null

您当前的位置：

首页 >

文章列表页 >

Design and analysis of 1-DOF nano-positioning stage

更新时间：2020-08-12

- Design and analysis of 1-DOF nano-positioning stage
- Optics and Precision Engineering Vol. 14, Issue 3, Pages: 428-433(2006)
- 作者机构：
  
  1. 武汉理工大学机电工程学院,湖北武汉,430070
  2. 华中科技大学机械科学与工程学院,湖北武汉,430074
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703.6
- Received：14 July 2005，
  
  Revised：10 April 2006，
  
  Published Online：30 June 2006，
  
  Published：30 June 2006
- 稿件说明：
移动端阅览
DAI Rong, XIE Tie-bang. Design and analysis of 1-DOF nano-positioning stage[J]. Optics and precision engineering, 2006, 14(3): 428-433.
DOI：

DAI Rong, XIE Tie-bang. Design and analysis of 1-DOF nano-positioning stage[J]. Optics and precision engineering, 2006, 14(3): 428-433. DOI：

摘要

研究开发了一种能实现大量程位移和纳米级定位精度的一维位移工作台。工作台采用粗、精两级定位机构

以精密衍射光栅传感器组成工作台位移的闭环检测系统。工作台可以实现0~6 mm 的位移及1 nm的定位分辨力。文中建立了由压电陶瓷驱动和柔性铰链导向的精定位机构的机电耦合模型

进行了精定位机构的模态分析和静力学分析

并采用ANSYS软件进行了有限元仿真运算。最后给出了工作台在表面三维微观形貌测量仪中的应用结果。

Abstract

A novel 1-DOF displacement stage with large motion range and nano-positioning precision was developed. The stage is a set of two-grades mechanism by coarse and fine positioning

and a diffraction grating is fixed to the stage to form a close loop displacement measuring system. The displacement range of the stage is 0~6 mm and the positioning resolution is 1 nm. A electromechanicel coupling modal of PZT actuated and flexure hinge guided fine positioning mechanism was established

its model and mechanics analysis was performed. The finite element analysis soft ANSYS was also used to simulate the behavior of the stage and an application example was presented at the last of the paper.

关键词

Keywords

references

. 孙立宁,孙绍云,曲东升,等. 基于PZT的微驱动定位系统及控制方法的研究[J]. 光学精密工程,2004,12(1):55-58. SUN L N,SUN S Y,QU D S,et al. Micro-drive positioning system based on PZT and its control[J].Optics and Precision Engineering,2004,12(1):55-58. (in Chinese)

. 刘品宽,孙立宁,曲东升,等. 新型二维纳米级微动工作台的动力学分析[J]. 光学精密工程,2002,10(2):143-146. LIU P K,SUN L N,QU D S,et al. Design and analysis of 2-DOF nano-positioning stage driven by PZT[J]. Optics and Precision Engineering,2002,10(2):143-146. (in Chinese)

. SCHMIT J, OLSZAK A. High-precision shape measurement by white-light interferometry with real-time scanner error correction[J]. Appl. Opt., 2002,41:5943-5950.

. 冯功和,韩德湘,周茂华. 激光全息光栅精密测试系统[J]. 激光与红外.1997,27(1):23-25. FENG G H, HAN D X, ZHOU M H. The precision measuring system of laser holographic optical grating[J].Laser and Infrared,1997, 27(1):23-25.(in Chinese)

. 戴少渡.材料力学[M]. 北京:国防工业出版社,2000. DAI S D. Material mechanics[M].Beijng: Defense Industry Press,2000.(in Chinese)

. 薛实福,李庆祥.精密仪器设计[M]. 北京:清华大学出版社,1991. XUE S F,LI Q X. Design of precision instruments[M]. Beijing:Qinghua University Press,1991.(in Chinese)

. ELMUSTAFA A A, LAGALLY M G. Flexural hinge guided motion nanopositioner stage for precision machine: finite element simulations[J]. Precision Engineering, 2001(25):77-81.

Views

819

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Analytical model and finite element analysis of piezoelectric displacement amplification mechanism

Novel sophisticated stepping linear piezoelectric actuator

Design and testing of harmonic reducer integrated with torque sensor

Vertical clamping deformation analysis and validation of 300 mm wafer warpage detection

Integrated platform for micro-vibration simulation and active-passive vibration isolation

Related Author

LING Ming-xiang

LIU Qian

CAO Jun-yi

LI Si-zhong

LIU Guo-song

ZHAO Hong-wei

ZENG Ping

CHENG Guang-ming

Related Institution

Institute of System Engineering, China Academy of Engineering Physics

School of Mechanical Engineering, Xi'an Jiaotong University

College of Mechanical Science and Engineering, Jilin University, Changchun 130025,China

School of Mechanical Engineering， Dalian University of Technology

Aerospace Information Research Institute， Chinese Academy of Sciences

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰