Research on off-axis conic asphere null testing using computer-aided alignment method

XUE Dong-lin; ZHENG Li-gong; WANG Shu-ping; ZHANG Xue-jun

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Research on off-axis conic asphere null testing using computer-aided alignment method

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- Research on off-axis conic asphere null testing using computer-aided alignment method
- Optics and Precision Engineering Vol. 14, Issue 3, Pages: 380-385(2006)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： TQ171.6+8
- Received：14 October 2005，
  
  Revised：08 April 2006，
  
  Published Online：30 June 2006，
  
  Published：30 June 2006
- 稿件说明：
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XUE Dong-lin, ZHENG Li-gong, WANG Shu-ping, et al. Research on off-axis conic asphere null testing using computer-aided alignment method[J]. Optics and precision engineering, 2006, 14(3): 380-385.
DOI：

XUE Dong-lin, ZHENG Li-gong, WANG Shu-ping, et al. Research on off-axis conic asphere null testing using computer-aided alignment method[J]. Optics and precision engineering, 2006, 14(3): 380-385. DOI：

摘要

分析了非球面补偿检验过程中由补偿器和镜面支撑结构的失调引入的调整量误差

给出了计算机辅助调整方法。建立了离轴二次非球面补偿检验计算机辅助调整系统的物理数学模型

求解了被检非球面镜的失调方位和量值

利用计算机控制调整架实现了系统辅助调整。建立了实验装置

给出了模拟调整和实际调整结果。经过计算机辅助调整后

被检离轴二次非球面的最终检验结果为0.028λ(RMS)(λ=632.8 nm)。

Abstract

The misalignment-induced aberrations by corrector and the support of the asphere were analyzed in this paper. A computed-aided alignment method was presented combining the interferometric test with the computer optimization for optical alignment

and a mathematical model was established to determine the misalignment. The simulated and actual experimental results of the alignment show that after four times alignment the test results of the asphere can reach up to 0.028λ(RMS) (λ=632.8 nm).

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references

. 张忠玉. 用补偿器测量非球面的研究[J]. 光学精密工程,1999,(1):125-129. ZHANG Z Y. Study of testing aspheric surface with null corrector [J]. Optics and Precision Engineering, 1999,(1):125-129.(in Chinese)

. 郭培基. 一种大数值子孔径小非球面检测用补偿器设计[J]. 光学精密工程 ,2002,(5):518-522. GUO P J. Null lens design for small aspherical surface with large NA[J]. Optics and Precision Engineering,2002,(5):518-522.(in Chinese)

. 曹根瑞. 补偿透镜法检验抛物面镜的调整误差分析 . 光学技术 ,1992,(3):2-5. CAO G R. Analysis of alignment error in aspherical mirror testing a null lens . Optical technique,1992,(3):2-5.(in Chinese)

. YOUNG E W,DENTE G C. The effects of rigid body motion in interferometric tests of large-aperture,off-axis, aspheric optics[J]. SPIE, 1985,540:59-69.

. DENTE G C. Seperating misalignment from misfigure in interferogram on off-axis asphere [J]. SPIE, 1983,429:187-193.

. ZHANG X J. Manufacturing and testing of two off-axis aspherical mirrors [J]. SPIE, 2001,4451:118-125.

. 郑立功. 离轴非球面CCOS加工过程关键技术的研究 . 中国科学院研究生院,2003:63-81. ZHENG L G. Study on the key technique of CCOS fabricating for off-axis aspheric mirrors .Graduate School of the Chinese Academy of Sciences, 2003:63-81.(in Chinese)

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