Study on outer driving precision PZT linear step actuator

YANG Shu-chen; LIU Jian-fang; YANG Zhi-gang; ZHAO Hong-wei

doi:null

您当前的位置：

首页 >

文章列表页 >

Study on outer driving precision PZT linear step actuator

Article | 更新时间：2020-08-12

- Study on outer driving precision PZT linear step actuator
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 652-657(2006)
- 作者机构：
  
  1. 吉林工程技术师范学院,吉林长春 130052
  2. 吉林大学机械工程学院,吉林长春 130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384
- Received：12 September 2005，
  
  Revised：13 June 2006，
  
  Published：2006
- 稿件说明：
移动端阅览
杨树臣, 刘建芳, 杨志刚, 赵宏伟. 外驱动双向推力型压电步进精密驱动器研究[J]. 光学精密工程, 2006,14(4): 652-657

YANG Shu-chen, LIU Jian-fang, YANG Zhi-gang, ZHAO Hong-wei. Study on outer driving precision PZT linear step actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 652-657
杨树臣, 刘建芳, 杨志刚, 赵宏伟. 外驱动双向推力型压电步进精密驱动器研究[J]. 光学精密工程, 2006,14(4): 652-657 DOI：

YANG Shu-chen, LIU Jian-fang, YANG Zhi-gang, ZHAO Hong-wei. Study on outer driving precision PZT linear step actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 652-657 DOI：

摘要

提出了一种新型的压电直线精密步进驱动器。该驱动器采用步进仿生运动的原理(Pusher)

以定子箝位和定子驱动的方式实现动子被动运动。在对驱动器工作原理和机械结构分析的基础上

建立以压电叠堆为驱动元件的直线驱动数学模型

并对其结构进行了有限元分析。这种驱动器采用双向推力的结构原理

实现了在正反向与运动过程中驱动特性的一致。实验证明

以这种新型驱动方式构造的驱动器实现了箝位牢固、高频率(100 Hz)驱动、高步进速度(30 mm/min)、大行程(>10 mm)、高分辨率(0.05 m)、大驱动力(100 N)等特点

大幅度提高了压电型步进驱动器的驱动性能

在精密运动、微操作、光学工程、精密定位等精密工程中有广阔的应用前景。

Abstract

A new precision linear PZT actuator was proposed to improve its drive capabilities. Based on the piezoelectric (PZT) technology

this paper adopts the principle of bionics and works with a new method of stator initiative anchoring/loosen and a distortion structure of double-side thin flexible hinge to solved the problems of anchoring/loosen

frequency

travelling

resolution and velocity. The experimental results show that the new linear PZT actuator has high frequency (100 Hz)

high speed (30 mm/min)

large travelling (>10 mm)

high resolution(0.05 m) and high load (100 N)

it can be applied for large travelling and high resolution driving device

optics engineering

precision positioning and some micro-manipulation field.

关键词

Keywords

references

LIU Y T,FUNG R F,HUANG T K. Dynamic response of a precision positioning table impacted by a soft-mounted piezoelectric actuator[J]. Precision Engineering, 2004,28(3); 252-260.[2] TENZER P E,MRAD R B. On amplification in inchworm precision positioners[J]. Mechatronics,2004,14:515-531.[3] KIM S CH,KIM S H. Precise rotary actuator by inchworm motion using dual wrap belts[J]. Review of Science Instruments, 1999,70(5): 2546-2550.[4] AWABDY B A, AHIH W C,AUSLANDER D M. Nanometer positioning of a linear motion stage under static loads[J]. IEEE Trans Mechantronics,1998,3(2):113-119.[5] 杨宜民.新型驱动器及其应用[M]. 北京:电子工业出版社,1998. YANG Y M. A new driver and its application[M]. Beijing:Electronic Industry Press,1998.(in Chinese)[6] FRANK J,KOOPMANN G H,CHEN W. Design and performance of a high force piezoelectric inchworm actuator[J]. SPIE,1999, 3668:717-723.[7] 吴一辉, 王立鼎, 马建旭. 新型微变位致动器的发展与应用[J]. 光学精密工程, 1996,4(2):7-13. WU Y H, WANG L D, MA J X. Develop and applications of new micro-motion actuators[J]. Optics and Precision Engineering, 1996,4(2):7-13.(in Chinese)[8] 孙立宁, 荣伟彬, 曲东升,等. 基于微操作的大行程高分辨率旋转微驱动器的研究[J]. 光学精密工程, 2001,9(6):7-13. SUN L N,RONG W B,QU D SH, et al. Research on a large travel and high resolution rotary micro driver based on micro-manipulation[J]. Optics and Precision Engineering, 2001,9(6):7-13.(in Chinese)[9] 张福学,王丽坤.现代压电学[M]. 北京:科学出版社,2001. ZHANG F X,WNAG L K. Modern piezoelectrinics[M]. Beijing:Science Press,2001.(in Chinese)[10] SHAMOTO E,MORIWAKI T.Development of a "walking drive"ultraprecision positioner[M].Precision Engineering. 1997, 20(2):85-92.(in Chinese)

Views

167

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Evaluation of imaging performance for electroluminescence defect detector

Effect of incident laser on resolution of LSCM

Modulation transfer function for color area CCD based on Bayer filtering

Enhancement of resolution for projective image of TFT-LCD by pixel-multiplexing

Calculation of resolution for EUV telescope based on surface roughness of mirrors

Related Author

Ai-jun YANG

Yi-hui SHEN

Jian-chun LIN

LI Fa-zhi

WANG Zhen

ZHANG Yun-hai

XIAO Yun

CHEN Xi-hui

Related Institution

Fujian Metrology Institute, National Photovoltaic Industry Measurement and Testing Center

School of Science, Beijing Jiaotong University

Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences

University of Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰