Study on precision PZT rotary step actuator with inner anchor/loosen

LIU Jian-fang; YANG Shu-chen; YANG Zhi-gang; CHENG Guang-ming

doi:null

您当前的位置：

首页 >

文章列表页 >

Study on precision PZT rotary step actuator with inner anchor/loosen

Article | 更新时间：2020-08-12

- Study on precision PZT rotary step actuator with inner anchor/loosen
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 594-601(2006)
- 作者机构：
  
  1. 吉林大学机械工程学院,吉林长春,130025
  2. 吉林工程技术师范学院,吉林长春,130052
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384;TH703.6
- Received：12 May 2005，
  
  Revised：18 July 2006，
  
  Published：2006
- 稿件说明：
移动端阅览
刘建芳, 杨树臣, 杨志刚, 程光明. 新型压电精密步进旋转驱动器研究[J]. 光学精密工程, 2006,14(4): 594-601

LIU Jian-fang, YANG Shu-chen, YANG Zhi-gang, CHENG Guang-ming. Study on precision PZT rotary step actuator with inner anchor/loosen[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 594-601
刘建芳, 杨树臣, 杨志刚, 程光明. 新型压电精密步进旋转驱动器研究[J]. 光学精密工程, 2006,14(4): 594-601 DOI：

LIU Jian-fang, YANG Shu-chen, YANG Zhi-gang, CHENG Guang-ming. Study on precision PZT rotary step actuator with inner anchor/loosen[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 594-601 DOI：

摘要

提出了一种新型的压电精密步进旋转驱动器。该驱动器根据仿生运动原理

以压电陶瓷叠堆为动力源

采用定子内侧箝位的方式和薄壁柔性铰链微变形结构

提高了箝位的稳定性和步进旋转的稳定性。通过静力学有限元分析和动力学分析

较深入地研究了该驱动器的运动特性。研究结果表明

该驱动器具有高频率(40 Hz)

较高速度(325 rad/s)

大行程(>360)

高分辨率(1 rad/step)

较大驱动力(30 Ncm)等特点

提高了压电精密步进旋转驱动器的驱动性能

在精密运动、微操作、光学工程、精密定位等精密工程领域有广阔的应用前景。

Abstract

A new precision rotary PZT actuator was proposed to improve its drive capabilities. Based on the piezoelectric (PZT) technology and the bionical principle

the PZT actuator uses a stator inner anchor/loosen and a distortion structure of thin shelf flexible hinge to improve the stability of anchor/loosen and step rotary. With a characteristic analysis from the finite element method

the results show that the new rotary PZT actuator works with high frequency (40 Hz)

high speed (325 rad/s)

large travel (360)

high resolution(1 rad/step) and high torque (30 Ncm) and it will be suitable for application to large travel and high resolution driving device

optical engineering

precision positioning and some micro-manipulation field.

关键词

Keywords

references

BEXELL M, JOHANSSON S. Characteristics of piezoelectric miniature motor [J]. Sensors Actuators,1999,75: 118-130.[2] PAROS J M, WEISBORD L. How to design flexure hinges [J]. Machine Design, 1965: 151-156.[3] 刘品宽,孙立宁. 新型二维纳米级微动工作台的动力学分析[J]. 光学精密工程, 2002,10(2):143-146. LIU P K,SUN L N.Dynamic analysis on a novel nanopositioning stage driven by PZT[J].Optics and Precision Engineering,2002,10(2):143-146.(in Chinese)[4] FRANK J,KOOPMANN G H,CHEN W CH. Design and performance of a high force piezoelectric inchworm actuator . SPIE,1999, 3668:717-723.[5] 杨志刚,李军. 具有柔性铰链的差式微位移放大机构的受力分析[J]. 压电与声光, 2000,17(1):57-61. YANG ZH G,LI J. Analytic solution of a differential action microscopic magnifying mechanism with flexure hinges[J]. Piezoelectrics & Acoustooptics,2000,17(1):57-61.(in Chinese)[6] 张福学,王丽坤. 现代压电学[M]. 北京:科学出版社,2001. ZHANG F X,WANG L K. Modern iezoelectricity[M]. Beijing:Science Publishing Company,2001.(in Chinese)

Views

190

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design and testing of harmonic reducer integrated with torque sensor

Vertical clamping deformation analysis and validation of 300 mm wafer warpage detection

Integrated platform for micro-vibration simulation and active-passive vibration isolation

Design and parameter optimization of frictionless cylinder based on aerostatic bearing

Three dimensional isolation system for large ground-based optical telescope

Related Author

WANG Xiaodong

DU Zhijie

SHEN Wenqiang

GAO Hailong

LIU Yujie

LOU Zhifeng

ZHANG Yibo

KONG Xinxin

Related Institution

School of Mechanical Engineering， Dalian University of Technology

Aerospace Information Research Institute， Chinese Academy of Sciences

School of Optoelectronics， University of Chinese Academy of Sciences

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰