Research on computer controlled polishing technology of &phi;124 mm aspheric reaction-burned silicon carbide mirror

NIU Hai-yan; ZHANG Xue-jun

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Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

Article | 更新时间：2020-08-12

- Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 539-544(2006)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林长春,130031
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： TQ171.684
- Received：22 September 2005，
  
  Revised：18 June 2006，
  
  Published：2006
- 稿件说明：
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牛海燕, 张学军. φ124 mm口径碳化硅质非球面镜面数控研抛技术研究[J]. 光学精密工程, 2006,14(4): 539-544

NIU Hai-yan, ZHANG Xue-jun. Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 539-544
牛海燕, 张学军. φ124 mm口径碳化硅质非球面镜面数控研抛技术研究[J]. 光学精密工程, 2006,14(4): 539-544 DOI：

NIU Hai-yan, ZHANG Xue-jun. Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 539-544 DOI：

摘要

介绍了碳化硅质光学镜面的光学加工流程和加工手段

分析了碳化硅光学镜面的光学加工过程各个步骤中所应用的磨料和加工方法。利用自主研制的非球面数控加工中心

探索一种新型轮式研磨抛光技术

解决了中小口径非球面元件的数控加工问题

形成比较规范的中小口径碳化硅非球面元件加工方法

并应用到124 mm口径两面均为非球面的碳化硅元件的加工中

工件最终加工精度为第一面:0.761 (PV)、0.059 (RMS) (=0.632 8 m);第二面:0.834 (PV)、0.089 (RMS) (=0.632 8 m)

满足了设计要求。

Abstract

Based on 124 mm aspheric reaction-burned silicon carbide (RB-SiC) mirror

an aspheric computer controlled manufacturing center was designed

and an advanced wheeled polishing technology was developed to solve the problem of manufacturing and testing mid or small sized aspherics. The polishing equipment

abrasives and wheeled polishing technology were introduced. Some testing results of surface figure were given

it is showed that the first surface figure of the RB-SiC is 0.761 (PV) and 0.059 (RMS) (=0.632 8 m)

the second surface figure of the RB-SiC is 0.834 (PV) and 0.089 (RMS) (=0.632 8 m)

respectively.

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Keywords

references

GILLMAN B E,JACOBS S D. Bound-abrasive polishing for optical glass[J]. Applied Optical,1998,37(16):3498-3505.[2] 罗松保,孙建明. 非球面曲面光学元件超精密加工装备与技术[J]. 光学精密工程, 2003, 11(1):75-79. LUO S B, SUN J M. Ultraprecision machine equipment and technology of aspheric optics [J]. Optics and Precision Engineering, 2003, 11(1):75-79. (in Chinese)[3] 薛栋林,张忠玉,张学军. 一种中小口径非球面元件数控抛光技术[J]. 光学精密工程,2005, 13 (2):198-204. XUE D L,ZHANG Z Y, ZHANG X J, et al.Computer controlled polishing technology for middle or small aspheric lens[J]. Optics and Precision Engineering,2005,13(2):198-204.(in Chinese)[4] 张忠玉,王权陡. 真空自励研磨抛光工艺的研究 . 光学精密工程,2001, 9 (3):238-241. ZHANG Z Y,WANG Q D. Polishing technology of vacuum-induced lap[J]. Optics and Precision Engineering,2001, 9 (3):238-241.(in Chinese)[5] 张忠玉,张学军. 中小口径非球面元件加工技术的探讨[J]. 光学技术,2001,27(6):524-525. ZHANG Z Y, ZHANG X J. Discussion on the fabrication technology of middle and small size aspheric optics element[J].Optical Technique, 2001,27(6):524-525. (in Chinese)[6] 孙新民,李树文. 四轴球体研磨机超精密研磨的机理及试验[J]. 光学精密工程, 2000, 8(1):46-50. SUN X M, LI SH W. Mechanism and experiment of superprecision ball lapping for the four shafts lapping machine[J]. Optics and Precision Engineering, 2000, 8(1):46-50. (in Chinese)[7] 李全胜,成晔. 光学自由曲面数控加工方法[J]. 光学技术,1998,11(6):77-81. LI Q SH, CHENG Y. NC fabrication method of optical free-form surface[J].Optical Technique, 1998,11(6):77-81. (in Chinese)[8] 范镝,张忠玉. 反应烧结碳化硅球面反射镜的光学加工与检测[J]. 光学技术,2004,30(1):6-8. FAN D, ZHANG Z Y. Optical surfacing of spherical reaction-burned silicon carbide (RB-SIC) mirror [J]. Optical Technique , 2004,30(1):6-8. (in Chinese)[9] 王贵林,戴一帆. 光学非球面加工中研抛盘尺寸合理选择的研究[J]. 机械工程学报,2004,40(1):147-150. WANG G L, DAI Y F. Research on the determination for the abrasive disks dimension in aspheric optics machine[J]. Chinese Journal of Mechanical Engineering, 2004,40(1):147-150. (in Chinese)[10] 范镝,张学军. 反应烧结碳化硅平面反射镜的光学加工[J]. 光学技术,2003,29(6):667-669. FAN D, ZHANG X J. Optical surfacing of flat reaction-burned silicon carbide mirror [J]. Optical Technique, 2003,29(6):667-669. (in Chinese)[11] 范镝,张忠玉. 碳化硅光学镜面加工[J]. 硅酸盐学报,2003,31(11):1096-1100. FAN D, ZHANG Z Y. Optical surfacing of spherical reaction-burned silicon carbide (RB-SIC) mirror [J]. Journal of the Chinese Ceramic Society, 2003,31(11):1096-1100. (in Chinese)

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Related Institution

College of Mechanical and Vehicle Engineering， Chongqing University

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长春光学精密机械与物理研究所

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Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

DOI：

摘要

Abstract

关键词

Keywords

references