Micro electrodes on-line measurement in micro EDM

GUO Rui; ZHAO Wan-sheng; LI Gang; LI Zhi-yong; ZHANG Yong

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Micro electrodes on-line measurement in micro EDM

更新时间：2020-08-12

- Micro electrodes on-line measurement in micro EDM
- Optics and Precision Engineering Vol. 14, Issue 6, Pages: 998-1003(2006)
- 作者机构：
  
  1. 哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
  2. 上海交通大学机械与动力工程学院上海,200030
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG661
- Received：24 April 2006，
  
  Revised：08 July 2006，
  
  Published Online：30 December 2006，
  
  Published：30 December 2006
- 稿件说明：
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GUO Rui, ZHAO Wan-sheng, LI Gang, et al. Micro electrodes on-line measurement in micro EDM[J]. Optics and precision engineering, 2006, 14(6): 998-1003.
DOI：

GUO Rui, ZHAO Wan-sheng, LI Gang, et al. Micro electrodes on-line measurement in micro EDM[J]. Optics and precision engineering, 2006, 14(6): 998-1003. DOI：

摘要

设计了微细电极在线检测系统。系统由卤素灯光源、变焦显微镜头、CCD摄像机和6自由度支架组成

具有1.61 μm的分辨率和113~729的放大率。在Linux平台下

基于V4L2 API开发了图像采集程序

使用mmap()内存映射方法获取图像数据。实现了IplImage数据结构和QImage类的转换

使图像既可以基于OpenCV进行处理

又可以基于Qt进行显示

通过Canny边缘检测算法提取了微细电极的边缘轮廓。实现了电极在线观测的G代码功能

进行了块状电极电火花磨削微细轴的实验。实验结果表明系统可以在线观察电极状态和在线测量电极尺寸

在线测量值与扫描电镜离线测量值的相对误差在5%以内

解决了微细电火花加工的微细电极在线制造和检测等难题。

Abstract

An on-line measurement system was proposed. It is composed of a halogen type light source

a zoom lens

a CCD camera and a bracket that has 6-degree of freedom. It has a resolution of 1.61 μm and a magnification of 113~729. Based on the Linux operating system

an image capturing program was developed with the V4L2 API

in which the image data was acquired with the method of mmap() memory map. The conversion between the data structure of IplImage and the class of QImage was implemented. Therefore the image could be processed by using OpenCV

as well as showed with Qt. The contour of micro electrodes can be extracted by means of the Canny edge detector. Furthermore

the G code for on-line measurement was also developed. The experiment of block electrodes Electrical Discharge Machining (EDM) grinding was carried out. It shows that the relative error between the on-line measurement system (OMS) and the scanning electron microscope (SEM) is less than 5%. It also shows that the system can be used to deal with the difficulties in micro electrodes on-line fabrication and measurement in micro EMD.

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Related Institution

哈尔滨工业大学微系统与微结构制造教育部重点实验室

哈尔滨工业大学MEMS中心，黑龙江哈尔滨 150001

National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

Department of Electronic Information and Automation, Chongqing University of Technology, Chongqing 400050, China

大连理工大学2. 大连理工大学机械工程学院

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