Research on novel inertial piezoelectric actuator

ZENG Ping; WEN Jian-ming; CHENG Guang-ming; WU Bo-da; YANG Zhi-gang

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Research on novel inertial piezoelectric actuator

Article | 更新时间：2020-08-12

- Research on novel inertial piezoelectric actuator
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 623-627(2006)
- 作者机构：
  
  吉林大学机械工程学院,吉林长春,130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384;TH703.6
- Received：12 November 2005，
  
  Revised：18 September 2006，
  
  Published：2006
- 稿件说明：
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曾平, 温建明, 程光明, 吴博达, 杨志刚. 新型惯性式压电驱动机构的研究[J]. 光学精密工程, 2006,14(4): 623-627

ZENG Ping, WEN Jian-ming, CHENG Guang-ming, WU Bo-da, YANG Zhi-gang. Research on novel inertial piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 623-627
曾平, 温建明, 程光明, 吴博达, 杨志刚. 新型惯性式压电驱动机构的研究[J]. 光学精密工程, 2006,14(4): 623-627 DOI：

ZENG Ping, WEN Jian-ming, CHENG Guang-ming, WU Bo-da, YANG Zhi-gang. Research on novel inertial piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 623-627 DOI：

摘要

基于控制移动机构和支撑面之间摩擦力的方法

提出了新型惯性冲击式压电陶瓷驱动机构的研究方案。分析了驱动机构的工作原理

驱动电压与驱动力、位移之间的关系

设计、制做了可实现直线往复运动的压电微型驱动器结构

并作了相关的性能测试。实验结果表明

采用简单的对称信号波形能驱动机构运动。直线驱动器最高速度可达1 mm/s

最大步长分辨率为20 nm

最大承载能力为1 000 g。

Abstract

Based on controlling the orderly changes of the PZT moving mechanism and friction between supporting faces in mechanical way

a kind of inertial piezoelectric actuator was proposed. The relationship between the driving voltage and the driving force and the distance were analyzed

the structure of a new inertial piezoelectric actuator that can realize single dimension reciprocating motion was designed and manufactured. The experimental results show that the simple associated symmetry electrical signal can provide stable stepping movement with the speed of 1 mm/s

high resolution of 20 nm and maximum loading capacity of 1 000 g

it is expected that the proposed actuator will be widely applied to precision industry.

关键词

Keywords

references

LIU Y T, TOSHIRO H. Precision positioning device utilizing impact force of combined piezo-pneumatic [J]. Asmetransactions on Mechatronics, 2001,6(4):467-473.[2] 孙立宁,刘品宽,吴善强,等. 管内移动微型机器人研究与发展现状[J]. 光学精密工程,2003,11(4):326-332. SUN L N,LIU P K,WU SH Q,et al. Status and development of in-pipe micro robots[J]. Optics and Precision Engineering,2003,11(4):326-332. (in Chinese)[3] KIMSH K. A precision linear actuator using piezoelectrically driven friction force [J]. Mechatronics , 2001,11(11):969-985.[4] ASANO M, MATSUOKA T, OKAMOTO H, etal. Study on micromobile machine with piezoelectric driving force actuator .IEEE Inter. Conf. on Robotics and Automation,1995:2955-2960.[5] 华顺明,程光明,阚君武,等. 压电精密位移驱动器的研究进展[J]. 压电与声光,2004,26(3):192-195. HUA SH M ,CHENG G M ,KAN J W,et al.The current research on the piezoelectric actuators for precision displacement [J]. Piezoelectric and Acoustooptics,2004,26(3):192-195. (in Chinese)[6] TOSHIYUKI M,MOTOMU A,SETSUYA M, etal. Improvement of micro mobile machine with piezoelectric driving force actuator . Sixth International Symposium on Micro Machine and Human Science,1995:211-217.[7] LIU Y T,WANG C W. A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator [J]. Sensors and Actuators A, 2002,102:83-92.[8] 迟冬祥,颜国正,丁国清. 基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究[J]. 光学精密工程,2001,9(2):135-138. CHI D X ,YAN G ZH ,DIN G Q .Inertial-friction based 4 D.O.F. microactuator driven by PZT [J].Optics and Precision Engineering,2001,9(2):135-138. (in Chinese)

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Related Institution

吉林大学机械学院

School of Electronic Engineering and Automation, Guilin University of Electronic Technology

National Demonstration Center for Experimental electronic circuit Education (Guilin University of Electronic Technology)

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Key Laboratory of Airborne Optical Imaging and Measurement, Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

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