Novel sophisticate stepping 2-DOF piezoelectric actuator

LIU Guo-song; YANG Zhi-gang; ZENG Ping; CHENG Guang-ming

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Novel sophisticate stepping 2-DOF piezoelectric actuator

Article | 更新时间：2020-08-12

- Novel sophisticate stepping 2-DOF piezoelectric actuator
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 602-606(2006)
- 作者机构：
  
  吉林大学机械工程学院,吉林长春,130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN384;TH703.6
- Received：12 August 2005，
  
  Revised：24 May 2006，
  
  Published：2006
- 稿件说明：
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刘国嵩, 杨志刚, 曾平, 程光明. 新型压电步进式二维精密驱动器[J]. 光学精密工程, 2006,14(4): 602-606

LIU Guo-song, YANG Zhi-gang, ZENG Ping, CHENG Guang-ming, . Novel sophisticate stepping 2-DOF piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 602-606
刘国嵩, 杨志刚, 曾平, 程光明. 新型压电步进式二维精密驱动器[J]. 光学精密工程, 2006,14(4): 602-606 DOI：

LIU Guo-song, YANG Zhi-gang, ZENG Ping, CHENG Guang-ming, . Novel sophisticate stepping 2-DOF piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 602-606 DOI：

摘要

设计了新型压电步进式精密二维驱动器。以压电叠堆为驱动元件

在单体柔性结构上实现直线和旋转驱动二维精密驱动。同时利用独特的双侧对称箝位结构

保证工作的稳定性和准确性。进行了二维驱动器的有限元分析

通过大量试验研究

证明二维驱动器达到基本设计功能。试验结果表明:二维驱动器的旋转驱动分辨率达到0.45 rad

行程360

速度达到0.04 rads

-1

时

扭矩可达0.2 Nm;直线驱动分辨率40 nm

行程20 mm

速度19.2 mmmin

-1

时

驱动力可达近10 N

可实现2自由度精密驱动。

Abstract

By taking a piezoelectric stack as actuator element to realize 2-DOF precision driving in linear and rotary actuators arranged on flexible processing structure

a new piezoelectric stepping style precision 2-DOF actuator was designed. The stability and precision of the system was ensured by using unique double symmetry structure of anchoring/loosing. The finite element analysis of 2-DOF actuator combining with lots of experiments research proved the basic functions of the 2-DOF actuator. The test results show rotary driving of 2-DOF actuator reaches 0.45 rad in resolution

18 mm in travel

0.04 rads

-1

in velocity and 0.2 Nm in torque; linear driving reaches 40 nm in resolution

20 mm in travel

19.2 mmmin

-1

in velocity and 10 N in driving power approximately.

关键词

Keywords

references

杨志刚,李军. 具有柔性铰链的差式微位移放大机构的受力分析[J]. 压电与声光, 2000,17(1):57-61. YANG ZH G,LI J. Analytic solution of A differential action microscopic magnifying mechanism with flexure hinges[J].Piezoelectrics and Acoustooptics,2000,17(1):57-61. (in Chinese)[2] 王纪武,陈恳. 典型柔性铰链精度性能的研究[J]. 清华大学学报,2001,41(11):49-52. WANG J W,CHEN K.Precision of typical flexible hinges[J].J.of Tsinghua University(Sci&Tech),2001,41(11):49-52. (in Chinese)[3] 华顺明,曾平. 新型二维压电移动机构[J]. 吉林大学学报(工学版),2004,34(4):587-591. HUA SH M,ZHENG P. New planar locomotive device using bimorph[J]. Journal of Jilin University(Engneering and Technology Edition) ,2004,34(4):587-591.(in Chinese)[4] WUT, PAUL I R. Dynamic peak amplitude analysis and bonding layer effects of piezoelectric bimorph cantilevers[J]. Smart Materials and Structure, 2004,13(1):203-210.[5] LI Y,GUO M,ZHOU ZH Y, et al. Micro electro discharge machine with an inchworm type of micro feed mechanism[J]. Precision Engineering.2002,26(1):7-14.[6] 于靖军,宗光华, 毕树生. 全柔性结构与MEMS[J]. 光学精密工程, 2001,9(1):1-5. YU J J,ZONG G H,BI SH SH.Fully complaint mechanisms and MEMS[J]. Optics and Precision Engineering, 2001,9(1):1-5.(in Chinese)[7] 刘国嵩,赵宏伟等. 新型压电步进型精密直线驱动器 . 光学精密工程, 2005,13(3):291-297. LIU G S,ZHAO H W. Novel sophisticate stepping linear piezoelectric actuator[J]. Optics and Precision Engineering, 2005,13(3):291-297.(in Chinese)

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