Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture

LI Rui-gang; ZHENG Li-gong; XUE Dong-lin; ZHANG Xue-jun

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Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture

Article | 更新时间：2020-08-12

- Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture
- Optics and Precision Engineering Vol. 14, Issue 4, Pages: 533-538(2006)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林长春,130031
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1;TQ171.6+5
- Received：24 October 2005，
  
  Revised：16 August 2006，
  
  Published：2006
- 稿件说明：
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李锐钢, 郑立功, 薛栋林, 张学军. 大口径高次、离轴非球面干涉测量中投影畸变的标定方法[J]. 光学精密工程, 2006,14(4): 533-538

LI Rui-gang, ZHENG Li-gong, XUE Dong-lin, ZHANG Xue-jun. Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 533-538
李锐钢, 郑立功, 薛栋林, 张学军. 大口径高次、离轴非球面干涉测量中投影畸变的标定方法[J]. 光学精密工程, 2006,14(4): 533-538 DOI：

LI Rui-gang, ZHENG Li-gong, XUE Dong-lin, ZHANG Xue-jun. Calibration method for projection distortion in interferometric testing high order and off-axis aspheric surface with big aperture[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 533-538 DOI：

摘要

提出了运用干涉仪的Fiducial功能确定干涉仪CCD的测量坐标系与非球面镜面坐标系的对应关系

然后对两者关系进行正交化拟合

从而标定出非球面干涉检验中的投影畸变

并用于某高次、离轴非球面进行干涉检验中的投影畸变标定

拟合精度为1.964 53 m。根据标定结果对干涉测量面形图重构

进行了数控抛光实验

最终面形精度达到均方根值/20(=0.632 8 m)

证明拟合精度完全满足数控抛光的要求。

Abstract

A calibration method was put forward for the projection distortion in interferometric testing of asphere surface. The method uses the Fiducial function of the interferometer to determine the relationship between the testing coordinate of the interferometer CCD and the coordinate of asphere mirror and make it orthogonalized fitting to calibrate the projection distortion of an off-axis and high order aspheric surface in interferometric testing phase

the fitting precision is 1.964 53 m. The reconstructed interferogram was used in the computer control polishing experiment

the final precision of surface shape is rms /20(=0.632 8 m). The experimental results show that the fitting precision satisfies the requirement of computer control polishing.

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Keywords

references

JONES R A,RUPP W J. Rapid optical fabrication with CCOS[J]. SPIE,1990,1333:34.[2] JONES R A. Fabrication of a large,thin,off-axis aspheric mirror[J]. Optical Engineering,1994,33(12):4067-4075.[3] 张学军. FSGJ-1非球面自动加工及在线检测系统[J]. 光学精密工程,1997,5(2):70-76. ZHANG X J.FSGJ-1 system of asphere automated manufacturing and on-line testing[J]. Optics and Precision Engineering,1997,5(2):70-76.(in Chinese)[4] 杨力. 大型非球面反射镜的柔性光学制造技术[J]. 光学技术,2001,27(6):490-492. YANG L. The flexible optical manufacturing technologies for large aspheric mirror[J]. Optical Technique,2001,27(6):490-492.(in Chinese)[5] RUCKMAN J. Recent advances in aspheric and conformal grinding at the center for optics manufacturing[J]. SPIE,1999,3782:2-11.[6] RUPP W J. The development of optical surfaces during the grinding process[J]. Applied Optics,1965,4(6):743-748.[7] MALACARA D. Optical shop testing(Second Edition)[M]. Wiley-Interscience,427-454[8] 郑立功. 高精度、大口径离轴非球面制造技术研究 . 中国科学院长春光学精密机械与物理研究所,2003:67-71. ZHENG L G.The research of manufacturing technologies of off-axis asphere with big aperture and high precision . Changchun Institute of Optics, Fine Mechanics and Physics, CAS, 2003:67-71.(in Chinese)[9] 徐利治. 现代数学手册(计算机数学卷)[M]. 华中科技大学出版社. XUE L ZH. Modern mathematics handbook(Volume of Computer Mathematics)[M]. Huazhong University of Science and Technology Press.(in Chinese)

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