Determination of groove density for bending gratings
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Determination of groove density for bending gratings
Optics and Precision EngineeringVol. 14, Issue 6, Pages: 986-989(2006)
作者机构:
中国科学技术大学 国家同步辐射实验室,安徽 合肥,230026
作者简介:
基金信息:
DOI:
CLC:O436.1;TH741
Received:09 January 2006,
Revised:17 May 2006,
Published Online:30 December 2006,
Published:30 December 2006
稿件说明:
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LIU Bin, LOU Jun, LIU Zheng-kun, et al. Determination of groove density for bending gratings[J]. Optics and precision engineering, 2006, 14(6): 986-989.
DOI:
LIU Bin, LOU Jun, LIU Zheng-kun, et al. Determination of groove density for bending gratings[J]. Optics and precision engineering, 2006, 14(6): 986-989.DOI:
Determination of groove density for bending gratings
Primary researches on the groove density variations of bending grating were experimented. Firstly
highly varied line-spacing gratings (nearly 9.2 line/mm) were fabricated. Meanwhile thin glasses with the thickness 0.16 mm were chosen as their substrates. Consequently
the long trace profiler was used to test the curved substrates precisely and the groove density of the gratings were measured by diffractive method. Experimental result shows that the error is 0.41 line/mm rms between experimental and theoretical values.