Principle and experiments of swing-arm profilometer
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Principle and experiments of swing-arm profilometer
Optics and Precision EngineeringVol. 15, Issue 4, Pages: 499-504(2007)
作者机构:
国防科技大学 机电工程与自动化学院,湖南 长沙 410073
作者简介:
基金信息:
DOI:
CLC:TH703
Received:22 April 2006,
Revised:18 November 2006,
Published Online:30 April 2007,
Published:30 April 2007
稿件说明:
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JIA Li-de, ZHENG Zi-wen, DAI Yi-fan, et al. Principle and experiments of swing-arm profilometer[J]. Optics and precision engineering, 2007, 15(4): 499-504.
DOI:
JIA Li-de, ZHENG Zi-wen, DAI Yi-fan, et al. Principle and experiments of swing-arm profilometer[J]. Optics and precision engineering, 2007, 15(4): 499-504.DOI:
Principle and experiments of swing-arm profilometer
在获得面形误差的同时获得了非球面面形参数误差。通过测量多条截线实现了对非球面面形的全口径检测。最后对直径200 mm
顶点曲率半径1 400 mm的凹形抛物面镜进行了测量
结果表明
系统重复精度优于0.8 μm
精度优于1 μm。
Abstract
The geometric principle of a swing-arm profilometer as a novel method to measure aspherics are introduced. The surface error of an asphere is obtained by testing its relative departure from some reference sphere
and different reference spheres are realized by adjustment of the length of the swing-arm and the angle between rotary axis and optical axis. A measuring set-up is built based on this principle
which consists of an ultra-precise 2-axes rotating-table
a high stiffness
lightweighted measurement arm
a 4-DOF stage and a scanning sensor
the testing software and data-processing software are programmed with the VC++6.0 and Matlab platform
respectively. The profilometer has advantages in shorter measuring range for a sensor and simple rotary measuring motion
and the disadvantages in complicated calibration and large DOF adjustment. A mathematic model is established to gain the error of conic aspheric parameters and surface error based on the nonlinear optimization of measured data and nominal figure
and the full-apearture of a 3D asphere is tested by measuring several transversals. Finally
a grinded paraboloid (
D
=200 mm
R
=1 400 mm) is tested
results indicate that the system has a good repeatability (