Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test
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Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test
Optics and Precision EngineeringVol. 15, Issue 6, Pages: 812-817(2007)
作者机构:
清华大学 精密仪器与机械学系 北京,100084
作者简介:
基金信息:
DOI:
CLC:TB92;O436.1;TP391.4
Received:19 October 2006,
Revised:08 January 2007,
Published Online:30 June 2007,
Published:30 June 2007
稿件说明:
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ZHANG Ming-zhao, WANG Bo-xiong, LUO Xiu-zhi, et al. Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test[J]. Optics and precision engineering, 2007, 15(6): 812-817.
DOI:
ZHANG Ming-zhao, WANG Bo-xiong, LUO Xiu-zhi, et al. Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test[J]. Optics and precision engineering, 2007, 15(6): 812-817.DOI:
Profile measurement for micro-varying liquid surface based on chessboard grating Ronchi test
a micro-varying surface profile measurement method was proposed
which can measure the slopes in two orthogonal directions of the surface simultaneously for reconstructing the surface profile by only one deformed chessboard grating pattern. Information of the two orthogonal directions in deformed chessboard grating patterns can be effectively separated and extracted through simple differential operation and extremum tracking. Based on the proposed method and the data extraction algorithm
a micro-varying surface profile measurement system was built up to measure a stationary surface and a varying surface. The results show that the system meets the measurement need of micro-varying liquid surface in some research fields with its resolution less than 0.1 μm and measurement range more than 50 μm.