Evaluation of efficiency for silicon wafer cleaning by image processing

WANG Xu-yue; XU Wei-xing; SI Ma-yuan; WU Dong-jing; KANG Ren-ke; GUO Dong-ming

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Evaluation of efficiency for silicon wafer cleaning by image processing

更新时间：2020-08-12

- Evaluation of efficiency for silicon wafer cleaning by image processing
- Optics and Precision Engineering Vol. 15, Issue 8, Pages: 1263-1268(2007)
- 作者机构：
  
  大连理工大学精密与特种加工教育部重点实验室,辽宁大连,116023
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG665;TP391.4
- Received：06 February 2007，
  
  Revised：29 May 2007，
  
  Published Online：30 August 2007，
  
  Published：30 August 2007
- 稿件说明：
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WANG Xu-yue, XU Wei-xing, SI Ma-yuan, et al. Evaluation of efficiency for silicon wafer cleaning by image processing[J]. Optics and precision engineering, 2007, 15(8): 1263-1268.
DOI：

WANG Xu-yue, XU Wei-xing, SI Ma-yuan, et al. Evaluation of efficiency for silicon wafer cleaning by image processing[J]. Optics and precision engineering, 2007, 15(8): 1263-1268. DOI：

摘要

介绍了一种基于Matlab图像处理工具箱技术的评价硅片表面污染颗粒激光清洗率的新方法。借助Matlab图像处理工具箱

对清洗前后硅片表面光学显微镜照片进行处理

编写硅片表面激光干法清洗率的评价程序

统计清洗前后硅片表面评价区域的污染颗粒个数

对清洗效果进行定量评价。研究结果证明

利用此方法统计的颗粒数准确度达97.6%

得到的激光清洗率准确度达99.2%。结果表明

借助图像处理技术评定清洗效果是一种高效、快速、准确的新方法。

Abstract

Based on Image Processing Toolbox of Matlab technique

a new evaluation method of cleaning efficiency is presented in dry laser cleaning particles of silicon wafer surface. Image Processing Toolbox of Matlab is used to recognize optical information of silicon wafer surface before and after laser cleaning and the evaluating programs are developed to count the number of pollution particles on the silicon wafer and to evaluate the cleaning efficiency. The results show that the statistical accuracy of the method is 97.6%

and the laser cleaning accurate reaches 99.2%. The research achievement offers a effective

rapid and accurate new evaluation method.

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Related Institution

Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology

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Jiangxi Province Key Laboratory of Multidimensional Intelligent Perception and Control

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