Micro-milling machine tool, micro-tool wear and cutting forces in micro-machining

ZHAO Yan; LIANG Ying-chun; BAI Qing-shun; WANG Bo; SUN Ya-zhou; CHEN Ming-jun

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Micro-milling machine tool, micro-tool wear and cutting forces in micro-machining

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- Micro-milling machine tool, micro-tool wear and cutting forces in micro-machining
- Optics and Precision Engineering Vol. 15, Issue 6, Pages: 894-902(2007)
- 作者机构：
  
  哈尔滨工业大学精密工程研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG501
- Received：22 November 2006，
  
  Revised：07 January 2007，
  
  Published Online：30 June 2007，
  
  Published：30 June 2007
- 稿件说明：
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ZHAO Yan, LIANG Ying-chun, BAI Qing-shun, et al. Micro-milling machine tool, micro-tool wear and cutting forces in micro-machining[J]. Optics and precision engineering, 2007, 15(6): 894-902.
DOI：

ZHAO Yan, LIANG Ying-chun, BAI Qing-shun, et al. Micro-milling machine tool, micro-tool wear and cutting forces in micro-machining[J]. Optics and precision engineering, 2007, 15(6): 894-902. DOI：

摘要

由于微机电系统(Micro Electro Mechanical System

MEMS)在微小零件加工中存在不足

微细铣削加工作为一项补充技术正在日益受到人们的重视。介绍了研制的微型精密三轴联动立式铣床(300 mm×300 mm×290 mm)的系统构成

开发了中文控制软件并集成了视频采集系统

此设备在薄膜型工件(膜厚65 μm)的微槽加工中取得了满意的效果(膜厚方向上材料去除率90.7%

成品率大于80%)。对微径端铣刀进行了力学特性分析

并通过刀具磨损试验分析了微径硬质合金TiA1N涂层及非涂层铣刀的磨损机理。最后通过槽铣硬铝2A12的试验研究了切削用量(主轴转速、背吃刀量和每齿进给量)对微细铣削力的影响

为微细铣削切削机理的深入研究奠定了基础。

Abstract

The system construction of a 3-axis precision micro-milling machine tool with overall size 300 mm×300 mm×290 mm was presented. The control software package integrated with a video collecting system in Chinese was developed to facilitate users' operation. This micro-milling machine tool has been successfully used in manufacturing a micro-groove in film work piece (the film thickness is 65 μm

material removal rate of the micro-groove along the film thickness is 90.7%

surface roughness of the bottom of the micro-groove is 0.365 μm

and the yield is more than 80%). Furthermore

the experiments with the TiAlN coated and uncoated carbide micro-end-milling tools were carried out to analyze the mechanical characteristics and wear mechanism of the tool. Finally

the effects of cutting parameters (spindle speed

cut depth and feed per tooth) on cutting forces were discussed. The works mentioned above are the foundation of next research on the mechanism of micro-end-milling.

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Related Institution

School of Mechanical and Power Engineering, Henan Polytechnic University

Department of Mechanical and Electrical Engineering, Xiamen University

Chengdu Fine Optic Engineering Research Center

Key Laboratory of Nondestructive Testing of the Ministry of Education, Nanchang Hangkong University

南京工程学院机械系

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