A micro-displacement magnifying mechanism used in piezo-stack pump is presented. Taking the piezoelectric multilayer actuators as drivers of amplifier

the displacement of piezoelectric multilayer actuator is amplified with the flexure hinge amplifier based on the principles of triangle amplification. The static and dynamic characteristics are tested on the prototype

the characteristics of good linearity

high resolution and high frequency are approved.Experimental results conclude that the mechanism can amplify the displacement to 5 times. The natural frequency reaches 1.8 kHz by finite element analysis while the actual measurement result is 1.5 kHz.