Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer (COP)

LUO Yi; WANG Xiao-dong; YANG Fan; LIU Chong

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Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer (COP)

更新时间：2020-08-12

- Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer (COP)
- Optics and Precision Engineering Vol. 15, Issue 7, Pages: 1090-1095(2007)
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点实验室,辽宁大连 116023
  2. 大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连 116023
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH706;TN405
- Received：15 February 2007，
  
  Revised：06 April 2007，
  
  Published Online：30 July 2007，
  
  Published：30 July 2007
- 稿件说明：
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LUO Yi, WANG Xiao-dong, YANG Fan, et al. Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer (COP)[J]. Optics and precision engineering, 2007, 15(7): 1090-1095.
DOI：

LUO Yi, WANG Xiao-dong, YANG Fan, et al. Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer (COP)[J]. Optics and precision engineering, 2007, 15(7): 1090-1095. DOI：

摘要

采用热压方法制备了COP微流控芯片。由于温度对微结构热压成形的质量影响最大

基于材料的粘弹性特性

通过变温准蠕变实验获得热压参考温度

即从材料玻璃点温度以下开始

以1.5 ℃/min的温升速率

在热压工作压力下热压聚合物基片

通过温度-位移实时采集系统获得材料的温度-形变曲线

曲线的拐点对应的温度即是热压参考温度。实验证明了在该温度下热压成形具有高复制精度和低整体变形

微结构宽度和深度方向的复制精度分别达到97.6%和94.3%。电泳实验和DNA分析实验得出COP芯片具有良好的生物兼容性

适用于生化分析。

Abstract

A hot embossing method is used to fabricate Cyclo-olefin Polymer (COP) microfluidic chip in this paper. Since temperature is the most important parameter in hot embossing process

the variable temperature quasi-creep experiment is set up to study the viscoelastic character of COP for determination of the working temperature. From a point of temperature below COP’s (

) temperature

applying the embossing working pressure

the temperature-deformation curve at slow temperature rising speed(1.5 ℃/min) is obtained. According to this curve

the hot embossing of microstructure under embossing reference temperature (

) has a high accuracy and low substrate deformatiom. Experiments show that average duplication precision is 97.6% in width and 94.3% in depth. Electrophoresis and DNA separation experiments have been done on fabricated COP chip

which shows that COP chip has excellent biologic compatibility and is suitable for biochemical analysis.

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