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Study on electrode process of UV-LIGA micro-electroforming by AC impedance method
更新时间:2020-08-12
    • Study on electrode process of UV-LIGA micro-electroforming by AC impedance method

    • Optics and Precision Engineering   Vol. 15, Issue 7, Pages: 1049-1055(2007)
    • CLC: TQ153.4
    • Received:28 December 2006

      Revised:21 March 2007

      Published Online:30 July 2007

      Published:30 July 2007

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  • Study on electrode process of UV-LIGA micro-electroforming by AC impedance method[J]. Optics and precision engineering, 2007, 15(7): 1049-1055. DOI:

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