Quantitative research on higher order harmonic suppression in 17~33 nm with different thickness Al filters

ZHOU Hong-jun; ZHONG Peng-fei; ZHENG Jin-jin; HUO Tong-lin; ZHANG Guo-bin; QI Ze-ming

doi:null

您当前的位置：

首页 >

文章列表页 >

Quantitative research on higher order harmonic suppression in 17~33 nm with different thickness Al filters

更新时间：2020-08-12

- Quantitative research on higher order harmonic suppression in 17~33 nm with different thickness Al filters
- Optics and Precision Engineering Vol. 15, Issue 7, Pages: 1016-1020(2007)
- 作者机构：
  
  1. 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027
  2. 中国科学技术大学国家同步辐射实验室,安徽合肥,230026
- 作者简介：
- 基金信息：
- DOI：
  CLC： O434.12
- Received：11 January 2007，
  
  Revised：06 April 2007，
  
  Published Online：30 July 2007，
  
  Published：30 July 2007
- 稿件说明：
移动端阅览
ZHOU Hong-jun, ZHONG Peng-fei, ZHENG Jin-jin, et al. Quantitative research on higher order harmonic suppression in 17~33 nm with different thickness Al filters[J]. Optics and precision engineering, 2007, 15(7): 1016-1020.
DOI：

ZHOU Hong-jun, ZHONG Peng-fei, ZHENG Jin-jin, et al. Quantitative research on higher order harmonic suppression in 17~33 nm with different thickness Al filters[J]. Optics and precision engineering, 2007, 15(7): 1016-1020. DOI：

摘要

利用840 l/mm的金膜透射光栅分光和AXUV100G 光电二极管(PD)探测器研究了不同厚度的Al滤片对光谱辐射标准和计量线(U27)球面光栅单色器(SGM)分支17~33 nm波段高次谐波的抑制情况。结果表明

Al滤片厚为400 nm时

在17~33 nm波段有较好的抑制效果且能保证探测器的信号强度

高次谐波信号强度分量小于2%。经过探测器量子效率修正后

高次谐波分量小于0.6%

这对多层膜反射率的定标及探测器定标有着重要的意义。

Abstract

With 840 l/mm transmission grating (made in house) behind the exit of Spherical Grating Monochromator (SGM) in Spectral Radiation Standard and Metrology (U27) beamline

the dispersion of exit beam and the contributions of different orders were analyzed. The results of higher order harmonics suppression by different thickness Al filters were given in the region of 17~33 nm. The results show that when the thickness of Al filter is 400 nm

and the wavelength between 17~33 nm

the contributions of higher orders to the detector signal are restricted to less than 2%

and the Photon Diode (PD) intensity is strong enough. After being corrected by quantum efficiency of the PD detector

the higher order contributions are less than 0.6%

which is important for calibration absolute reflectivities of multilayer and detector.

关键词

Keywords

references

Views

249

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Effect of the synchrotron radiation experiment configuration on the rocking curve of crystal

KB mirror system of X-ray photo-emission electron microscope beamline

Current status and trends of stitching interferometry in synchrotron radiation field

Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm

Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror

Related Author

Zhong-liang LI

Jun-liang YANG

Ye ZHU

Lian XUE

Li SONG

Jia-hua CHEN

Xue-peng GONG

Song XUE

Related Institution

University of Chinese Academy of Sciences

Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences

Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility

Shanghai Institute of Applied Physics, Chinese Academy of Sciences

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰