您当前的位置：
首页 >
文章列表页 >
Design and test of reference mirror in 300 mm interferometer
更新时间：2020-08-12

    • Design and test of reference mirror in 300 mm interferometer

    • Optics and Precision Engineering   Vol. 15, Issue 8, Pages: 1235-1240(2007)
    • CLC： TH744.3

    • Received：23 October 2006，

      Revised：29 May 2007，

      Published Online：30 August 2007，

      Published：30 August 2007

    移动端阅览

  • WU Xu-hua, CHEN Lei, WANG Lei. Design and test of reference mirror in 300 mm interferometer[J]. Optics and precision engineering, 2007, 15(8): 1235-1240. DOI：

  •  
  •  

0

Views

1067

下载量

7

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

High thrust focused magnetic linear motor for needling massive transfer platform
Controllable manipulation of long-distance microparticles based on fiber optic tweezers
Energy optimization and experimental for a permanent magnet-biased redial magnetic bearing
Numerical simulation and analysis of X-ray focusing telescope in mounting process
Tool influence function in aspheric polishing under dynamic pressure distribution

Related Author

LIU Qiang
MA Ning
WANG Wei
HAN Bangcheng
NIU Pingjuan
Chunlei JIANG
Huasheng SHUI
Peng CHEN

Related Institution

Key Laboratory of Inertial Technology， Beihang University
School of Electronic and Information Engineering， Tiangong University
Institute of Precision Electromagnetic Equipment and Advanced Measurement Technology， Beijing Institute of Petrochemical Technology
College of Electrical Information Engineering， Northeast Petroleum University
Institute of Precision Electromagnetic Equipment and Advanced Measurement Technology, Beijing Institute of Petrochemical Technology
0