High-gain PID controller for nanometer positioning

LU Li-hua; GUO Yong-feng; Tachikawa Hiroyuki; LIANG Ying-chun; Shimokohbe Akira

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High-gain PID controller for nanometer positioning

更新时间：2020-08-12

- High-gain PID controller for nanometer positioning
- Optics and Precision Engineering Vol. 15, Issue 1, Pages: 63-68(2007)
- 作者机构：
  
  1. 哈尔滨工业大学精密工程研究所,黑龙江哈尔滨,150001
  2. 东京工业大学精密工学研究所, 日本横滨 2268503
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP273
- Received：04 July 2006，
  
  Revised：08 October 2006，
  
  Published Online：30 January 2007，
  
  Published：30 January 2007
- 稿件说明：
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LU Li-hua, GUO Yong-feng, Tachikawa Hiroyuki, et al. High-gain PID controller for nanometer positioning[J]. Optics and precision engineering, 2007, 15(1): 63-68.
DOI：

LU Li-hua, GUO Yong-feng, Tachikawa Hiroyuki, et al. High-gain PID controller for nanometer positioning[J]. Optics and precision engineering, 2007, 15(1): 63-68. DOI：

摘要

建立了高增益PID闭环控制系统

在"直流伺服电机＋滚珠丝杠"驱动机构上实现了大范围的纳米定位。对于"伺服电机＋滚珠丝杠"驱动系统来说

摩擦是实现纳米定位精度的主要障碍

它影响着系统微动特性并导致稳态误差。针对这种驱动系统

在根据标定参数计算得到的线性传递函数的基础上

设计高增益不完全微分、比例反馈PID控制器

配置闭环控制系统的极点为负实轴上的多重极点

避免了摩擦力建模和补偿。实验结果表明

该高增益闭环控制系统有效地抑制了摩擦等非线性因素的影响

在系统的宏动和微动特性阶段都可以实现单步的纳米定位并取得了一致的响应

10 nm~10 mm阶跃响应的稳态误差不超过±2 nm。

Abstract

Nanometer positioning was realized in a DC-motor and ball-screw-driven stage by a high gain controller. With effecting of friction on microdynamic characteristics and steadystate errors of the stage

it is a major obstacle to the achievement of nanometer positioning. In this paper

a high gain PID control structure was designed with proportional and derivative terms placed in the feedback path. Controller parameters were calculated by multiple closed-loop poles placement according to the macrodynamics alone and no friction modeling and compensation were necessary. Experimental and simulated results indicate that the PID controller can provide a sufficiently high loop gain to suppress friction effect so that single-step nanometer positioning and uniform responses of micro-motion and macro-motion are achieved. In point-to-point positioning for step heights from 10 nm to 10 mm

the positioning error is within ±2 nm.

关键词

Keywords

references

. 郑子文,李圣怡. 滚珠丝杠传动机构的微动特性及轨迹跟踪控制[J]. 光学精密工程,2001, 9(4): 360-363. ZHENG Z W, LI SH Y. Ultra-precision positioning and tracking using ball screw . Opt. Precision Eng., 2001, 9(4): 360-363. (in Chinese)

. HSIEH C, PAN Y C. Dynamic behavior and modeling of the pre-sliding static friction[J]. Wear, 2000, 242(1):1-17.

. CHEN C L, JANG M J, LIN K C. Modeling and high precision control of a ball-screw-driven stage[J]. Precision Eng., 2004, 28:483-495.

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. 张寅孩,张仲超. 用Bang-Bang 控制策略实现快速定位最优系统[J]. 电力电子技术,2003, 31(1): 22-24. ZHANG Y H, ZHANG ZH CH. A high-performance high-speed positioning orientation optimum system with low-cost based on Bang-Bang controller[J]. Power Electron., 2003, 31(1): 22-24. (in Chinese)

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