One-dimension optical fiber array with silicon V-grooves

LIANG Jing-qiu; HOU Feng-jie

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One-dimension optical fiber array with silicon V-grooves

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- One-dimension optical fiber array with silicon V-grooves
- Optics and Precision Engineering Vol. 15, Issue 1, Pages: 89-94(2007)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN253
- Received：11 May 2006，
  
  Revised：12 September 2006，
  
  Published Online：30 January 2007，
  
  Published：30 January 2007
- 稿件说明：
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LIANG Jing-qiu, HOU Feng-jie. One-dimension optical fiber array with silicon V-grooves[J]. Optics and precision engineering, 2007, 15(1): 89-94.
DOI：

LIANG Jing-qiu, HOU Feng-jie. One-dimension optical fiber array with silicon V-grooves[J]. Optics and precision engineering, 2007, 15(1): 89-94. DOI：

摘要

阐述了一维光纤阵列的研制方法

分析了V型槽法中硅V型槽腐蚀机理

计算了V型槽的开口及间距与光纤半径及纤芯截面圆心距的关系

给出了最小槽深与光纤半径及V型槽开口的关系式。用各向异性腐蚀技术制作了硅V型槽

比较了紫外及红外粘接剂的性能

进行了光纤的排列、粘接及抛光

制作出一维光纤阵列。用原子力显微镜测量光纤阵列表面粗糙度为纳米量级

用ZYGO数字干涉仪检测光纤的端头位置误差为3~5 μm。该项工作为二维光纤阵列的高精度制备奠定了基础。

Abstract

one-dimension optical fiber array has been extensively applied in optical communication

optical imaging and detection systems recently. The manufacturing method of one-dimension optical fiber array and the principle of etching Si-V-grooves are introduced. The size of Si-V-grooves and the space between them are calculated according to the radius of the fiber

and a formula on the minimum depth of the Si-V-grooves is given

which related with the fiber radius and the opening space of the grooves. As a typical example

the silicon V-groove array is micromachined with anisotropic etching process

then the fibers are arranged and adhered in corresponding to the Si-V-grooves. The roughness of polished fiber surface measured with atomic force microscope (AFM) is in nanometer magnitude

and the position error is 3~5 micron

which shows these works will lay the foundation for further study on two-dimension fiber array.

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Keywords

references

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