Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation

LIU Yan; TAN Jiu-bin; WANG Lei

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Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation

Article | 更新时间：2020-08-12

- Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation
- Optics and Precision Engineering Vol. 15, Issue 10, Pages: 1602-1608(2007)
- 作者机构：
  
  哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH161.6;TP211.53;TH74
- Received：03 July 2007，
  
  Revised：21 August 2007，
  
  Published Online：30 October 2007，
  
  Published：30 October 2007
- 稿件说明：
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刘彦,谭久彬,王雷. 差动电磁作动器的超大型光学仪器隔振基础的主动控制机理[J]. 光学精密工程, 2007,15(10):1602-1608

LIU Yan, TAN Jiu-bin, WANG Lei. Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation[J]. Optics and precision engineering, 2007, 15(10): 1602-1608.
刘彦,谭久彬,王雷. 差动电磁作动器的超大型光学仪器隔振基础的主动控制机理[J]. 光学精密工程, 2007,15(10):1602-1608 DOI：

LIU Yan, TAN Jiu-bin, WANG Lei. Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation[J]. Optics and precision engineering, 2007, 15(10): 1602-1608. DOI：

摘要

提出了一种基于差动电磁作动器的超大型光学仪器隔振基础的主动控制机理。该控制机理采用差动布置方案

使电磁作动器变为输出力和控制电流呈线性关系的线性作动器

再利用小阻尼条件下

绝对速度反馈与Skyhook控制方法性能接近且易于工程实现的特点

采用了绝对速度反馈的控制方法

可在不改变中/高频隔振性能的前提下大幅提高谐振区隔振性能。实验结果表明:利用所提出的控制机理

在时域上

z、θ

和θ

三个自由度的速度(角速度)均方根值分别由10.06 μm/s、4.16×10

－6

rad/s和4.65×10

－6

rad/s降至3.38 μm/s、1.76×10

－6

rad/s和1.49×10

－6

rad/s;在频域上

三个自由度谐振区隔振性能均有约10 dB的提高。

Abstract

In order to improve further vibration isolation performance

a new active vibration control mechanism based on differential electromagnet actuator is presented for room-sized vibration isolation foundation. By using the differential scheme

the output force of the actuator is linear with control current. Because absolute velocity feedback method and Skyhook method have the similar performance in the weak damping conditions and the former method is more easier to realize

the absolute velocity feedback method is selected as the control strategy. The control strategy can efficiently improve the performance in resonance area without losing the performance of high frequency area. Experiment results show that by using the proposed mechanism

the mean square roots of velocity or angle velocity at the three degree-of-freedom

and

fall to 3.38μm/s

1.76×10

－6

rad/s and 1.49×10

－6

rad/s from 10.06μm/s

4.16×10

－6

rad/s and 4.65×10

－6

rad/s in time domain

and the vibration isolation performance in resonance area improves 10dB in frequency domain.

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