Measurement of microchannels of PMMA microfluic chip

WEN Wei-li; ZUO Chun-cheng; YU Jian-qun; ZHANG Xue-jun; LIU Qing-min; CHEN Xiang-wei; LIU

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Measurement of microchannels of PMMA microfluic chip

更新时间：2020-08-12

- Measurement of microchannels of PMMA microfluic chip
- Optics and Precision Engineering Vol. 15, Issue 2, Pages: 212-218(2007)
- 作者机构：
  
  1. 吉林大学机械科学与工程学院,吉林长春,130025
  2. 吉林大学生物与农业工程学院,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP391.4:TB92
- Received：02 March 2006，
  
  Revised：11 December 2006，
  
  Published Online：20 February 2007，
  
  Published：20 February 2007
- 稿件说明：
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WEN Wei-li, ZUO Chun-cheng, YU Jian-qun, et al. Measurement of microchannels of PMMA microfluic chip[J]. Optics and precision engineering, 2007, 15(2): 212-218.
DOI：

WEN Wei-li, ZUO Chun-cheng, YU Jian-qun, et al. Measurement of microchannels of PMMA microfluic chip[J]. Optics and precision engineering, 2007, 15(2): 212-218. DOI：

摘要

研究了一种基于光电耦合器件(CCD)及图像处理技术的聚甲基丙烯酸甲酯(PMMA)微流控芯片微通道几何尺寸的测量系统

论述了该系统的关键技术及其实现方法

包括图像的预处理、二值化、轮廓提取以及微通道尺寸的测量等。利用该系统测量的微通道几何尺寸(1~1 000 μm)与轮廓仪和万能工具显微镜的测量结果吻合很好

最大测量误差为2 μm(半深宽度)

分析了测量误差产生的原因。检测实验结果表明:该检测方法提供的微通道几何尺寸评定正确可行、通用性好、应用简便

还可以避免轮廓仪在深结构测量中的误差。

Abstract

Based on CCD-image and image processing technology

a measuring system for microchannel's sizes was developed. The non-contact measuring method for geometrical sizes was presented by means of the digital image manipulation technology

including image preprocessing

image binary-conversion

boundary encoding and calculation of microchannel's geometrical sizes

etc. The measured results show that the maximum measuring error by proposed method is 2 μm

which accords with the results measured by a stylus profiler and a universal measuring microscope. The reasons to cause the error were analyzed

results indicate that this method is correct

feasible

simple to use

and can avoid the errors often made by stylus in deeper structures.

关键词

Keywords

references

. DARWIN R R, DIMITRI L, PIERRE A A, et al.. Micro total analysis systems. 1. introduction, theory, and technology[J]. Anal. Chem., 2002,74: 2623-2636.

. TORSTEN V, DIRK J, ANDREAS M. Micro total analysis systems. recent developments[J]. Anal. Chem., 2004,76: 3373-3386.

. XIANG Z, FRED E R. Analysis of channel-geometry effects on separation efficiency in rectangular-capillary electrochromatography columns[J]. J. Chromatogr. A, 2000,869: 319-328.

. LUNG M F, RUEY J Y, GWO B L. Analysis of geometry effects on band spreading of microchip electrophoresis[J]. Electrophoresis, 2002,23: 602-612.

. MAYNES D, WEBB B W. Fully developed electro-osmotic heat transfer in microchannels[J]. Int. J. Heat Mass Tran., 2003,46: 1359-1369.

. WU H Y,CHENG P. Friction factors in smooth trapezoidal silicon microchannels with different aspect ratios[J].Int. J. Heat Mass Tran.,2003,46:2519-2525.

. 李佳列,丁国清,颜国正,等. 采用CCD的非接触测量中提高精度的一种方法[J]. 光学精密工程,2002,10(3):281-284. LI J L,DING G Q,YAN G ZH, et al.. Method for improving precision in noncontact measurement by linear CCD[J].Opt. Precision Eng., 2002,10(3):281-284.(in Chinese)

. 张少军,苟中魁,李庆利,等. 利用数字图像处理技术测量直齿圆柱齿轮几何尺寸[J]. 光学精密工程,2004,12(6):619-625. ZHANG SH J,GOU Z K,LI Q L, et al.. Digital image processing technology for spur gear measurement[J].Opt. Precision Eng.,2004,12(6):619-625.(in Chinese)

. 陈岳林,汪杰君,许廷丽. 金相组织数字化数据采集系统[J]. 光学精密工程,2005,13(增):183-186. CHEN Y L,WANG J J,XU T L.Data collecting system for metallography tissue digitalization[J]. Opt. Precision Eng.,2005,13(supp.):183-186.(in Chinese)

. 张泰石,李刚,郑羽,等. 用线性补偿算法和CCD响应补偿来提高频谱OCT图像质量[J]. 光学精密工程,2006,14(5):929-933. ZHANG T SH,LI G,ZHENG Y,et al.. Improvement of spectral domain OCT image quality by linear interpolation and CCD response compensation[J]. Opt. Precision Eng.,2006,14(5):929-933.(in Chinese)

. 赵渊博,赵慧洁. 挠性接头薄筋厚度在线测量图像分割方法研究[J]. 光学精密工程,2005,13(增):153-157. ZHAO Y B,ZHAO H J. Study on image segmentation method for on-line measurement of tendon thickness for flexible connector[J]. Opt. Precision Eng.,2005,13(Supp.):153-157.(in Chinese)

. 于建群,王立鼎,刘军山,等. 塑料电泳芯片微结构模压的试验研究[J]. 机械工程学报,2004,40(11):93-97. YU J Q, WANG L D, LIU J SH, et al.. Experimental research of hot embossing of microchannels for plastic capillary electrophoresis chips[J]. Chin.J. Mech. Eng., 2004,40(11): 93-97.(in Chinese)

. 朱铮涛,黎绍发. 镜头畸变及其校正技术[J]. 光学技术,2005,31(1):136-141. ZHU ZH T,LI SH F.Lens distortion and proofreading technology[J]. Opt. Tech.,2005,31(1):136-141.(in Chinese)

. LYVERS E P, MITCHELL O R. Subpixel measurements using a moment based edge operator[J]. IEEE Trans Pattern Anal. Mach. Intell., 1989,11(12): 1293-1309.

. 薛向东,吴黎明,邓耀华,等. IC晶片关键尺寸标定的新方法研究[J]. 半导体技术,2005,30(12):35-37. XUE X D, WU L M, DENG Y H, et al.. Study on the new method of CD calibrating for IC wafer[J]. Semicond. Technol., 2005,30(12):35-37.(in Chinese)

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