Key algorithms of automatic image measurement system
|更新时间:2020-08-12
|
Key algorithms of automatic image measurement system
Optics and Precision EngineeringVol. 15, Issue 2, Pages: 294-301(2007)
作者机构:
华南理工大学 机械工程学院,广东 广州 510640
作者简介:
基金信息:
DOI:
CLC:TP391.4
Received:14 May 2006,
Revised:17 November 2006,
Published Online:20 February 2007,
Published:20 February 2007
稿件说明:
移动端阅览
ZHANG Wu-jie, YANG Yi-lu, LI Di, et al. Key algorithms of automatic image measurement system[J]. Optics and precision engineering, 2007, 15(2): 294-301.
DOI:
ZHANG Wu-jie, YANG Yi-lu, LI Di, et al. Key algorithms of automatic image measurement system[J]. Optics and precision engineering, 2007, 15(2): 294-301.DOI:
Key algorithms of automatic image measurement system
介绍了系统比例尺的设定方法以及光栅尺读数的误差补偿方法。实验结果表明:比例尺的标定精度为0.5 μm;图元的测量精度在微米级;高度测量精度为0.035 mm
基本满足自动影像测量的稳定可靠、精度高、抗干扰能力强等要求。
Abstract
In order to realize automatic image measurement for work pieces
an automatic image measurement system is established and the algorithms used in this system such as geometric figure recognition and measurement
height measurement based on autofocus
etc are investigated. The geometric figure recognition algorithms according to the geometric features such as the circle and circularity of area and rectangle are presented and measuring principles and algorithms of typical plane geometric figures are analyzed by taking the measurement of the line and circle geometric figures as an example i.e.
the figure fitting is adopted after the edge points of geometric figures are extracted. Then
after the performance of several autofocus evaluating methods is compared
the algorithm of height measurement by visual automatic focusing is analyzed. Finally
the setting method for scale and the error compensation algarithm of raster reading are discussed as well. Experimental results indicate that the precision of the system's scale is 0.5 μm and the measuring precision of figures is within micron
the precision of height measurement is 0.035 mm
which can satisfy the system requirements of non-contact
online
real time
higher precision and rapid speed
as well as strong anti-jamming and stabilization.
关键词
Keywords
references
. 邹定海,叶声华,王春和. 用于在线测量的视觉检测系统[J]. 仪器仪表学报,1995,16(4): 337-340. ZHOU D H, YE SH H, WANG CH H. A visual inspection system for on-line measurement [J]. Chinese J. Sci. Instrum., 1995, 16(4): 337-340.(in Chinese)
. 周亘. 微机在工件不圆度自动测量中的应用[J]. 基础自动.2001,8(6): 50-53. ZHOU G. The application of computer in automatic measure of the non-round degree of the parts [J]. Basic Automat., 2001,8(6): 50-53.(in Chinese)
. 郭强生,靳卫国,周庆亚. 集成电路粘片机视觉检测技术研究[J]. 电子工业专用设备,2005,34(7):34-40. GUO Q SH, JIN W G, ZHOU Q Y. Vision inspection technology of IC die bonder [J]. Equip. Electron. Prod. Manuf., 2005,34(7):34-40.(in Chinese)
. WEI ZH ZH, ZHANG G J, LI X. The application of machine vision in inspecting position-control accuracy of motor control systems . Proceedings of the Fifth International Conference on Electrical Machines and Systems Shenyang, P.R. China: ICEMS, 2001.
. SCAMAN M E, ECONOMIKOS L. Computer vision for automatic inspection of complex metal patterns on multichip modules (MCM-D)[J]. IEEE Trans. Compon., Packa., Manuf. Technol., Part B: Adv.Pack., 1995,18(4): 675 - 684.
. YING Y B, WANG J P, JIANG H Y. Inspecting diameter and defect area of fruit with machine vision [J]. Trans. CSAE, 2002, 18(5): 216-220.
. 姜志国,韩冬兵,袁天云,等. 基于全自动控制显微镜的自动聚焦算法研究[J]. 中国图像图形学报,2004,9(4): 396-401. JIANG Z G, HAN D B, YUAN T Y, et al.. Study on auto focusing algorithm for automatic microscope [J]. J. Image Graphics, 2004,9(4): 396-401. (in Chinese)
. YANG C C, MAREFAT M M, CIARALLO F W. Error analysis and planning accuracy for dimensional measurement in active vision inspection [J]. IEEE Trans. Robot. Autom., 1998, 14(3): 476-487.
. 吴晓波,安问斗,杨钢. 图像测量系统中的误差分析即提高测量精度的途径[J]. 光学 精密工程,1997,5(1):133-141. WU X B, AN W D, YANG G. Error analysing and approaches of improving measuring precision in image measuring system [J]. Opt. Precision Eng., 1997, 5(1): 133-141. (in Chinese)