Rotation-angle-accuracy measurement of piezo tilt platform

GAO Liang; KAN Shan-shan; LI Min; NI Qi-liang; CHEN Bo

doi:null

您当前的位置：

首页 >

文章列表页 >

Rotation-angle-accuracy measurement of piezo tilt platform

更新时间：2020-08-12

- Rotation-angle-accuracy measurement of piezo tilt platform
- Optics and Precision Engineering Vol. 15, Issue 2, Pages: 206-211(2007)
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TB92;TH751
- Received：22 February 2006，
  
  Revised：08 June 2006，
  
  Published Online：20 February 2007，
  
  Published：20 February 2007
- 稿件说明：
移动端阅览
GAO Liang, KAN Shan-shan, LI Min, et al. Rotation-angle-accuracy measurement of piezo tilt platform[J]. Optics and precision engineering, 2007, 15(2): 206-211.
DOI：

GAO Liang, KAN Shan-shan, LI Min, et al. Rotation-angle-accuracy measurement of piezo tilt platform[J]. Optics and precision engineering, 2007, 15(2): 206-211. DOI：

摘要

提出了一种亚角秒精度的转角测量方法。利用ZYGO数字干涉仪测量压电陶瓷转动平台驱动待测标准平面镜偏转前后镜子面形精度的PV(Peak Valley)值

二者的差值除以待测标准平面镜的直径

其结果近似等于压电陶瓷转动平台转动的角度。通过测量与误差分析

验证了压电陶瓷转动平台的转角精度小于1 μrad(0.2″)

而测量的总误差和压电陶瓷转动平台移动的角度大小有关

移动距离越大

产生的误差越大

但其相对误差小于1％。本测量方法证明压电陶瓷精密转动平台转角精度达到了极紫外太阳望远镜(EUT)0.8″的角分辨率的要求。

Abstract

A sub-arc-second-accuracy method for measuring rotation-angle was proposed. The tiny rotation-angle of the PZT was obtained using the diameter of the reference flat mirror divide the difference between the PVs when PZT move and don’t move. By measuring and analyzing

the rotation angle accuracy of the PZT is less than 1 μrad(0.2″).The total error changes with the rotation angle of the PZT

but its relative error was smaller than 1%. The result indicates that the measuring technique can meet the resolution of the EUT to 0.8″.

关键词

Keywords

references

. 陈波,尼启良,曹继红,等. 空间软X射线/极紫外波段正入射望远镜研究[J]. 光学精密工程,2003,11(4):315-319. CHEN B, NI Q L, CAO J H, et al.. Development of a space soft X-ray and EUV normal incidence telescope [J]. Opt. Precision Eng., 2003,11(4):315-319. (in Chinese)

. 陶卫,浦绍邦,孙运斌. 角度测量技术的发展[J]. 激光杂志,2002, 23(2):5-7. TAO W, PU SH B, SUN Y B. The development of angle measurement technique[J]. Laser J., 2002,23(2):5-7.(in Chinese)

. 孔志勇,赵红颖,熊文卓,等. 采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率[J]. 光学精密工程,2001,9(3):260-264. KONG ZH Y, ZHAO H Y, XIONG W ZH, et al.. Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology[J]. Opt. Precision Eng., 2001,9(3):260-264. (in Chinese)

. 佘琳, 冯长有,丁林辉. 两步法测量编码器测角误差[J]. 光学精密工程, 2004,12(1):66-77. SHE L, FENG CH Y, DING L H. Measurement of encoder errors with two-step method[J]. Opt. Precision Eng., 2004, 12(1):66-77.(in Chinese)

. 孟中,张涛,郑秀筠,等. 正交基函数多项式实时拟合在轴角编码器测速中的应用[J]. 光学精密工程.2006,14(2):303-307. MENG ZH, ZHANG T, ZHENG X J, et al.. Application of real time polynomial fitting based on orthogonal basis function algorithm to encoder rate measurement[J]. Opt. Precision Eng., 2006, 14(2):303-307.(in Chinese)

. CHIU M H,SU D C.Angle measurement using total-internal-reflection heterodyne interferometry[J]. Opt. Eng., 1997, 36(6): 1750-1753.

. SAILER R,STRAUSS W S L,GSCHWEND M H,et al..Total internal reflection fluorescence spectroscopy for probing porphyrin fluorescence in cell membranes[J]. SPIE, 1996,2926:162-169.

. 张红胜,冯长有. 光电定角比相法测圆光栅测量精度的提高[J]. 光学精密工程.2000,8(5):482-486. ZHANG H SH, FENG CH Y. Improvement of measurement precisions of circular raster by photoelectric phase-comparing method for angle positioning[J]. Opt. Precision Eng., 2000, 8(5):482-486. (in Chinese)

. PLAMER E W.Goniometer with continuously rotating grating for use as angle standard[J]. Precision Eng., 1988, 10(3):147-152.

. SHANG H M,TOH S L,FU Y,et al..Measurement of angle of rotation using circular optical grating[J]. SPIE, 2001,4317:72-78.

. FOO C,MADAN G,LAI T, et al..Michelson-interferometer-based method for measuring the angle of rotation[J].SPIE, 2002,4588:320-325.

. APOSTOL D,DAMIAN V S,LOGOFATU P C,et al.. Interferometric angular transducers[J].SPIE, 1995,2461:548-510.

. KIM J W,KIM J A,KANG C S,et al..A novel Michelson interferometer combined with an autocollimator for the simulataneous measurement of linear and angular displacement[J].SPIE, 2005,5879:1-11.

. 金国藩,李景镇.激光测量学[M]. 北京:科学出版社,1998. JIN G F, LI J ZH. laser surveying[M]. Beijing: Science Press,1998.(in Chinese)

. PI User Manual PZ 107E S-330 Tip/Tilt Platform 2003-09-09[Z].

Views

664

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Rotation-angle-accuracy measurement of scanning mechanism in variable included angle plane grating monochromater

Related Author

LU Qi-peng

MA Lei

PENG Zhong-qi

Related Institution

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Graduate University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰