Research on application of femtosecond laser multi-focus on parallel fabrication

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Research on application of femtosecond laser multi-focus on parallel fabrication

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- Research on application of femtosecond laser multi-focus on parallel fabrication
- Optics and Precision Engineering Vol. 16, Issue 1, Pages: 48-54(2008)
- 作者机构：
  
  中国科学院深圳先进技术研究院生物医学与健康工程研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：25 April 2007，
  
  Revised：31 July 2007，
  
  Published Online：22 January 2008，
  
  Published：22 January 2008
- 稿件说明：
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龚小竞,褚家如,王翔,黄文浩,杨建军,张铁群,朱晓农. 飞秒激光多次聚焦在并行加工中的应用研究[J]. 光学精密工程, 2008,16(1):48-54

Research on application of femtosecond laser multi-focus on parallel fabrication[J]. Optics and precision engineering, 2008, 16(1): 48-54.
龚小竞,褚家如,王翔,黄文浩,杨建军,张铁群,朱晓农. 飞秒激光多次聚焦在并行加工中的应用研究[J]. 光学精密工程, 2008,16(1):48-54 DOI：

Research on application of femtosecond laser multi-focus on parallel fabrication[J]. Optics and precision engineering, 2008, 16(1): 48-54. DOI：

摘要

飞秒激光的并行加工多是利用分光元件先分光再加工，在实际应用中，这种方法无法对加工出的平行结果进行灵活的控制。本文通过控制飞秒激光在介质中的多次聚焦，实现微光波导的并行加工，总结出影响加工的控制因素，并且对这种加工方法的机理和控制因素作了理论分析。由于不依赖分光元件，该方法对并行加工的控制相对灵活。对于飞秒激光的并行加工，该方法提出了一个值得发展的方向。

Abstract

The femtosecond laser often makes parallel fabrication via multi-beam

which is split by the beam splitters. This ordinary method can not control the fabricated parallel outcomes flexibly in practical application. In this article

the parallel fabrication of micro waveguides is realized by controlling the multi-focus of femtosecond laser in optical media. The controlling factors which affect the fabrication are summarized. And the mechanism and factors are theoretically analyzed. This method is relatively flexible on the controlling of the parallel fabricating

because it doesn’t depend on any beam splitters. This fabrication method brings forward a revolutionary way of the parallel fabrication of femtosecond laser.

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Related Institution

Key Laboratory of Intelligent Computing and Signal Processing ofthe Ministry of Education, Anhui University

Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China

School of Electrical Engineering and Automation, Anhui University

International School of Materials Science and Engineering， Wuhan University of Technology

School of Materials Science and Engineering， Wuhan University of Technology

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