Nanoscale Measurement Technique of MEMS In-plane Motion Based on Block Matching

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Nanoscale Measurement Technique of MEMS In-plane Motion Based on Block Matching

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- Nanoscale Measurement Technique of MEMS In-plane Motion Based on Block Matching
- Optics and Precision Engineering Vol. 16, Issue 3, Pages: 505-510(2008)
- 作者机构：
  
  天津大学精仪学院
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：30 August 2007，
  
  Revised：25 October 2007，
  
  Published Online：22 March 2008，
  
  Published：22 March 2008
- 稿件说明：
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陈治. 基于块匹配的MEMS平面纳米精度运动测量[J]. 光学精密工程, 2008,16(3):505-510

Nanoscale Measurement Technique of MEMS In-plane Motion Based on Block Matching[J]. Optics and precision engineering, 2008, 16(3): 505-510.
陈治. 基于块匹配的MEMS平面纳米精度运动测量[J]. 光学精密工程, 2008,16(3):505-510 DOI：

Nanoscale Measurement Technique of MEMS In-plane Motion Based on Block Matching[J]. Optics and precision engineering, 2008, 16(3): 505-510. DOI：

摘要

MEMS谐振器周期运动过程中各个时刻的运动特性及其动态特性参数

为MEMS器件的设计提供重要参考。本文提出一种基于块匹配方法的灰度补偿亚像素运动估计算法。该算法可以对因图像灰度变化而引起的误差进行补偿，实现纳米级分辨力测量。利用该算法对MEMS器件的运动历程做分析，得到特定驱动频率下MEMS器件的幅度－相位曲线。实验结果表明，该方法测量重复性为5nm。

Abstract

Motion measurement was a key method to get characteristic and dynamic parameters of MEMS resonator in every moment. The results of measurement gave important reference to MEMS designation. In this paper

an algorithm based on block matching was designed so that it was insensitive to frame-to-frame intensity variations. MEMS motion process is analyzed using the algorithm. The offered solution achieved nanoscale accuracy by always employing a small and fixed number of computations

independent of the iterative method. The amplitude-phase curve of MEMS in special driving frequency was got. Experimental results indicate that the repetition of measurement is 5nm.

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Related Author

ZHOU Shuhua

DONG Chenchen

XU Sixiang

ZHANG Hao

Li-sheng ZHANG

Kun WANG

Shao-hua CHEN

Bang-cheng HAN

Related Institution

College of Mechanical Engineering， Anhui University of Technology

Beijing Engineering Research Center of High-speed Magnetically Suspended Motor Technology and Application

School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University

Science and Technology on Inertial Laboratory, Fundamental Science on Novel Inertial Instrument & Navigation System Technology Laboratory, Beihang University

Institute of Optics and Electronics, Chinese Academy of Sciences

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