Study of Si modified coatings on SiC substrate with ion beam assisted

doi:null

您当前的位置：

首页 >

文章列表页 >

Study of Si modified coatings on SiC substrate with ion beam assisted

Article | 更新时间：2020-08-12

- Study of Si modified coatings on SiC substrate with ion beam assisted
- Optics and Precision Engineering Vol. 16, Issue 3, Pages: 381-385(2008)
- 作者机构：
  
  长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：20 July 2007，
  
  Revised：30 October 2007，
  
  Published Online：22 March 2008，
  
  Published：22 March 2008
- 稿件说明：
移动端阅览
陈红,高劲松,宋琦,王彤彤,申振峰,王笑夷,郑宣鸣,范镝. 离子辅助制备碳化硅改性用硅膜的研究[J]. 光学精密工程, 2008,16(3):381-385

Study of Si modified coatings on SiC substrate with ion beam assisted[J]. Optics and precision engineering, 2008, 16(3): 381-385.
陈红,高劲松,宋琦,王彤彤,申振峰,王笑夷,郑宣鸣,范镝. 离子辅助制备碳化硅改性用硅膜的研究[J]. 光学精密工程, 2008,16(3):381-385 DOI：

Study of Si modified coatings on SiC substrate with ion beam assisted[J]. Optics and precision engineering, 2008, 16(3): 381-385. DOI：

摘要

本文介绍了一种利用霍尔型离子源辅助电子束蒸发，在碳化硅（Silicon Carbide: SiC）材料上制备硅改性薄膜的方法，研究了不同沉积速率下改性后的抛光效果。对样品进行了表面散射及反射的测量。通过样品的显微照片可知硅膜层在沉积速率增大条件下结构趋于疏松。通过精细抛光改性的反应烧结碳化硅（Reaction Bonded Silicon Carbide: RB-SiC）样品表面散射系数减小到1.46%，反射率接近抛光良好的微晶玻璃。温度冲击实验和表面拉力实验表明硅膜无龟裂和脱落，性质稳定，与碳化硅基底可以良好的结合。

Abstract

Ion beam assisted deposition (IBAD) based on End-Hall source was introduced to fabricate a Si coating on RB-SiC substrate. High-quantity surface photograph

surface scattering at 635nm and reflectance spectrum were measured at room temperature. The results showed that films became loose under fast deposition rates. The coefficient of surface scattering was decreased from 3.56% to 1.46% after surface modified polish by Si coating

which was approximate to the scattering level of Zerodur glass. The temperature and surface tensile experiment indicated that Si coating was combined well with the SiC substrate.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Material removal and surface damage behavior of diamond grain for flexible scribing RB-SiC

IAD-Si Coatings on RB-SiC Space Mirrors for super-polished surface

Material removal and surface damage behavior of diamond grain for flexible scribing RB-SiC

Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

Related Author

Yaru WANG

Yingjie LI

Lai ZOU

Congcong HAN

Yutong LI

徐领娣

郑立功

张学军

Related Institution

College of Mechanical and Vehicle Engineering， Chongqing University

Key Laboratory of Optical System Advanced Manufacturing Technology， Chinese Academy of Sciences

School of Mechatronics Engineering， Harbin Institute of Technology

长春光机所

College of Mechanical and Vehicle Engineering of Chongqing University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰