Testing of weak aspheric surfaces by real-time interferometry

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Testing of weak aspheric surfaces by real-time interferometry

Article | 更新时间：2020-08-12

- Testing of weak aspheric surfaces by real-time interferometry
- Optics and Precision Engineering Vol. 16, Issue 2, Pages: 184-189(2008)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所光学技术研究中心
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：18 July 2007，
  
  Revised：12 August 2007，
  
  Published Online：22 February 2008，
  
  Published：22 February 2008
- 稿件说明：
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王孝坤. 干涉法实时测量浅度非球面技术[J]. 光学精密工程, 2008,16(2):184-189

Testing of weak aspheric surfaces by real-time interferometry[J]. Optics and precision engineering, 2008, 16(2): 184-189.
王孝坤. 干涉法实时测量浅度非球面技术[J]. 光学精密工程, 2008,16(2):184-189 DOI：

Testing of weak aspheric surfaces by real-time interferometry[J]. Optics and precision engineering, 2008, 16(2): 184-189. DOI：

摘要

提出了一种干涉实时检测非球面的新方法，该方法无需补偿器，CHG等辅助元件就能实现对浅度非球面的测量。对非球面度较小的非球面，直接利用标准球面镜作为参考表面，通过数字干涉仪可以测得全孔径位相分布，将所得的数据剔除参考球面波相对理论非球面的偏差，并运用最小二乘拟合求得机构定位误差，消去此误差，从而能够获得真实的面形信息。利用该方法对一口径为350mm的浅度双曲面进行了测量，通过数据分析和处理得到面形误差的PV值和RMS值分别为0.387λ 和 0.048λ ( =632.8nm)。并将该结果与零位补偿的检测结果相比较，两面形分布是一致的，其PV值和RMS值的偏差分别为0.033λ 和 0.006λ 。说明该技术对检测浅度非球面是切实可行的。

Abstract

A real-time interferometric method for testing asphere was proposed. It can measure aspherical surface of small asphericity without other null optics. When the tested asphere is close to a sphere，a sphere mirror is used as the reference surface. The phase distribution can be obtained by the the digital wavefront interferometer. The surface error was obtained by substracting the theory wavefront error from the phase datum and eliminating the translation error though least-squares fitting. Meanwhile the experiment was carried on with a 350mm aspheric mirror by this method. As results

the PV and RMS of the surface error was 0.387λ and 0.048λ

respectively; the surface map and interferogram were consistent to the surface map and interferogram tested by null compensation; and the difference of PV and RMS error between them was 0.033λ and 0.006λ

respectively. The results conclude that this method is feasible and accurate.

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Related Institution

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Changchun Branch of Jilin Ltd.Co., China Mobile Communication Corporation

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

The State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

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