The MEMS (Micro Electromechanical System) gyroscopes are being considered for use in a number of application areas such as stabilization

general rate control

and autopilot systems in aircraft and missiles. The benefits of MEMS gyroscopes compared with conventional gyroscopes are well known and include low cost

potential for miniaturization and low power consumption. The resonant output gyroscope

as its name implies

utilizes resonant sensing as the basis for Coriolis force detection. Resonant sensing has several advantages such as a lower capacitance noise

large dynamic range

good scale factor linearity and a direct frequency output. However

the mechanical noise resulted from vibrating mass and the error resulted from external acceleration can not be canceled. In this paper

a new device called the Dual-mass resonant output silicon microelectromechanical gyroscope is described and consists of two proof masses vibrating in the tens of kilohertz and two resonating sense elements designed resonant frequency an order of magnitude higher than that of the proof masses. The function of Coriolis force versus the angular rotational rate was analyzed by dynamics analysis. The resonant frequency of beam subjected to an axial time-varying Coriolis force was described by the Rayleigh-Ritz energy method. Appling the Mathieu Equation

the dynamics of the DETF (Double-ended tuning fork) resonator and the scale factor of gyroscope were analyzed. The gyroscope overcomes several of the problems compared with single-mass resonant output gyroscope

such as cancellation of acceleration effects can be achieved through two mechanically coupled masses vibrating anti-phase to each other.